Fig. 1. E-field distribution and peak values of ideal high-reflective coatings under 1064 nm laser irradiation. (a) E-field distribution of D1; (b) peak E-field values in H- and L-layers of D1 to D14

Fig. 2. E-field distributions of nodule defects in D1 to D14. (a) Nodule with a seed diameter of 550 nm; (b) nodule with a seed diameter of 1000 nm

Fig. 3. E-field distributions of high-reflective coatings (at 1064 nm) as a function of design incident angles. (a) High refractive index layer of ideal high-reflective coating; (b) low refractive index layer of ideal high-reflective coating; (c) high refractive index layer of high-reflective coating with nodule with a seed diameter of 550 nm; (d) low refractive index layer of high-reflective coating with nodule with a seed diameter of 550 nm; (e) high refractive index layer of high-reflective coating with nodule with a seed diameter of 1000 nm; (f) low refractive index layer of high-reflective coating with nodule with a seed diameter of 1000 nm

Fig. 4. E-field distributions in L and H layers on air side of high-reflective coatings with nodule defects with different design incident angles. (a) Nodule with a seed diameter of 550 nm; (b) nodule with a seed diameter of 1000 nm

Fig. 5. Spectral, surface, and stress properties of high-reflective coatings. (a) Theoretical and measured reflectance spectra under design incident angle; (b) surface roughness; (c) coating stress

Fig. 6. Laser-induced damage thresholds (LIDTs) of different high-reflective coating samples. (a) Nanosecond LIDT; (b) picosecond LIDT

Fig. 7. Typical nanosecond laser-induced damage morphology of high-reflective coatings. (a) Morphology, damage morphology, and E-field distribution of nodule defect in sample S3; (b) damage morphology of plasma scald in sample S3; (c) nodule-related damage morphology in different samples

Fig. 8. Typical picosecond laser-induced damage morphology of high-reflective coatings without pre-planted nodule defects. (a) Damage morphology of sample S1 under picosecond laser irradiation with different laser fluences; (b) damage morphology in different samples

Fig. 9. Typical picosecond laser-induced damage morphology of high-reflective coatings. (a) Damage morphology of nodule defects in different samples; (b) damage morphology of nodule defects in sample S3 under picosecond laser irradiation with different laser fluences

Fig. 10. Nodule-related damage morphology under picosecond laser irradiation with fluence near LIDT

Fig. 11. Damage morphology of nodule defect induced by nanosecond or picosecond laser. (a) Nanosecond laser pulse; (b) picosecond laser pulse