Significance Femtosecond laser 3D printing has emerged as a revolutionary technology in micro-nano manufacturing, enabling the fabrication of complex 3D structures with sub-diffraction-limit resolution. Inorganic materials, known for their excellent mechanical properties, thermal stability, and chemical resistance, are widely used in optical devices, MEMS sensors, and biomedical applications. However, traditional manufacturing methods for inorganic micro-nano structures face limitations, such as complex processing, low precision, and high costs, which restrict their potential in high-performance device fabrication. The advent of femtosecond laser 3D printing provides a promising solution to overcome these challenges, offering exceptional spatial resolution and material versatility. This survey systematically reviews recent progress in the techniques and applications of femtosecond laser 3D printing for inorganic materials, focusing on organic-inorganic hybrid and pure inorganic systems. The study also explores the challenges and future directions, emphasizing the potential of this technology in advancing micro-nano fabrication.
Progress Femtosecond laser 3D printing leverages nonlinear optical effects of two-photon absorption to achieve high-resolution fabrication of complex three-dimensional structures, making it a versatile tool for inorganic material processing. This technology has been employed in two primary approaches: organic-inorganic hybrid systems and pure inorganic material systems. Organic-inorganic hybrid systems combine the flexibility of polymer matrices with the superior properties of inorganic components by incorporating precursors or nanoparticles into light-sensitive resins. The process involves two-photon polymerization for precise structuring, followed by high-temperature sintering to enhance material performance, although challenges such as achieving uniformity and minimizing shrinkage remain. Pure inorganic material systems, on the other hand, bypass organic components entirely by using direct laser-induced reactions, such as photochemical reduction or decomposition, to fabricate high-purity structures with enhanced thermal and chemical stability. These techniques have facilitated advancements in various applications, including the production of optical microdevices like microlenses and photonic crystals, MEMS sensors with integrated 3D microstructures for force and environmental sensing, and life sciences applications such as biocompatible scaffolds and micro-robots for minimally invasive procedures. The ongoing development of femtosecond laser 3D printing is characterized by increasing standardization, compatibility with diverse materials and processes, scalability for industrial applications, and modularity in manufacturing, paving the way for significant technological breakthroughs.
Conclusions and Prospects Femtosecond laser 3D printing represents a transformative advance in the fabrication of inorganic micro-nano structures. Despite its potential, several challenges remain, including low processing efficiency, material restrictions, and issues with thermal stability and shrinkage during post-processing. Future developments should focus on enhancing processing throughput through techniques such as parallel laser writing and digital light modulation. Additionally, innovations in material chemistry, including the development of low-shrinkage precursors and advanced hybrid systems, are essential for broader applicability. The integration of artificial intelligence and machine learning for process optimization holds promise for automated, intelligent manufacturing. These advancements are expected to unlock new applications in photonics, MEMS, and biomedical engineering, driving the evolution of femtosecond laser 3D printing into a cornerstone technology for next-generation micro-nano manufacturing.