Fig. 1. Optical configuration of the DMD-based SIM system. L1, L2, and L3, collimating lenses; M, high-reflectivity mirror; DM, dichroic mirror.

Fig. 2. (a) Optical models and ray-tracing analyses of the ETL and objective lens in ZEMAX, (b) NA variation during axial scanning, and (c) PSF variation during axial scanning.

Fig. 3. (a) Relationship between the focus shift distance and ETL drive current, and (b) relationship between the field magnification and the ETL drive current.

Fig. 4. Generation of phase-shifted sinusoidal fringes using a DMD: (a) binary patterns programmed to the DMD at three different phases; (b) corresponding illumination patterns captured at the objective focal plane; (c) measured intensity profiles of the illumination patterns along the cut-lines in (b) for the three phases, i.e., Φ=0, 2π/3, and 4π/3.

Fig. 5. (a) Pollen imaging results from our SIM system versus (b) a regular wide-field microscope. Scalar bar=10μm.

Fig. 6. (a)–(d) Images obtained by the ETL; (e)–(h) images obtained by the precision z-stage. Images of the same depths are grouped in the same row. Scalar bar=10μm.