Acta Optica Sinica, Volume. 32, Issue 8, 812001(2012)
Rigorous Vector Analysis of the Effect of Illumination Objective Lens Aberration on the Quality of Far-Field Diffracted Wave Front
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Lu Zengxiong, Jin Chunshui, Ma Dongmei. Rigorous Vector Analysis of the Effect of Illumination Objective Lens Aberration on the Quality of Far-Field Diffracted Wave Front[J]. Acta Optica Sinica, 2012, 32(8): 812001
Category: Instrumentation, Measurement and Metrology
Received: Feb. 5, 2012
Accepted: --
Published Online: Jun. 25, 2012
The Author Email: Lu Zengxiong (lzengx103@163.com)