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Acta Optica Sinica, Volume. 32, Issue 8, 812001(2012)

Rigorous Vector Analysis of the Effect of Illumination Objective Lens Aberration on the Quality of Far-Field Diffracted Wave Front

Lu Zengxiong1,2、*, Jin Chunshui1, and Ma Dongmei1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Article index updated: Sep. 28, 2025

    The article is cited by 6 article(s) CLP online library. (Some content might be in Chinese.)
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    Lu Zengxiong, Jin Chunshui, Ma Dongmei. Rigorous Vector Analysis of the Effect of Illumination Objective Lens Aberration on the Quality of Far-Field Diffracted Wave Front[J]. Acta Optica Sinica, 2012, 32(8): 812001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 5, 2012

    Accepted: --

    Published Online: Jun. 25, 2012

    The Author Email: Lu Zengxiong (lzengx103@163.com)

    DOI:10.3788/aos201232.0812001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology