Opto-Electronic Engineering, Volume. 31, Issue 3, 41(2004)
Experimental study for ion beam sputtering deposition of Ta2O5 optical thin film
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Experimental study for ion beam sputtering deposition of Ta2O5 optical thin film[J]. Opto-Electronic Engineering, 2004, 31(3): 41
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