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Opto-Electronic Engineering, Volume. 45, Issue 12, 180198(2018)

Real-time correction of image drift in scanning electron microscope

Xu Wei1, Gu Sen1, Chu Chengzhi1, Jin Zhenwei1, and Ru Changhai1,2
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    Xu Wei, Gu Sen, Chu Chengzhi, Jin Zhenwei, Ru Changhai. Real-time correction of image drift in scanning electron microscope[J]. Opto-Electronic Engineering, 2018, 45(12): 180198

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    Paper Information

    Category: Article

    Received: Apr. 17, 2018

    Accepted: --

    Published Online: Dec. 18, 2018

    The Author Email:

    DOI:10.12086/oee.2018.180198

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology