Tilt Measurement of Profile Accuracy of Slider Inner Raceway

Xiaoyun Xu; Yi Ou; Hutian Feng; Kai Wang; Rui Wang

doi:10.3788/AOS201737.1012005

Acta Optica Sinica, Volume. 37, Issue 10, 1012005(2017)

Tilt Measurement of Profile Accuracy of Slider Inner Raceway

Xiaoyun Xu^1,2, Yi Ou^1,2、*, Hutian Feng^1,2, Kai Wang^1,2, and Rui Wang^1,2

Author Affiliations

¹ School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China

² Key Laboratory of Ministry of Industry and Information Technology, General Technology of Functional Parts of Numerical Control Machine, Zhangjiagang, Jiangsu 215600, China

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Figures & Tables(14)

Fig. 1. Measurement index of slider

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Fig. 2. Sensor installation diagram; (b) sensor layout

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Fig. 3. Intersection model of plane and cylindrical surface. (a) Plane intersects the bottom of the cylinder; (b) plane does not pass through the bottom of the cylinder

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Fig. 4. Diagram of sensor installation declination β

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Fig. 5. Relationship between a' and angle β. (a) When β is between 0° and 5°; (b) when β is between -6° and 10°

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Fig. 6. (a) Tooling assembly drawing; (b) side view of the test

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Fig. 7. Results of runout of air flotation platform. (a) Vertical runout; (b) horizontal runout

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Fig. 8. Schematic of measuring standard round bar with arbitrary position

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Fig. 9. Measured contour image of slider. (a) Missing point; (b) when β=0°; (c) when β>0°

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Fig. 10. Slider contour image when rotating β angle. (a) β=0°; (b) β=2°; (c) β=5°

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Table 1. Measurement results of standard round bar cross test

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Table 1. Measurement results of standard round bar cross test

R₁ /mm	R₂ /mm	β₁ /(°)	β₂ /(°)	ΔR_2max /μm	ΔR_2min /μm	σ /mm	ΔR /μm
10.5	10	0.158	0.146	1.987	-1.991	1.940	-1.066
10	10.5	0.145	0.156	1.660	-1.435	1.314	-0.097
10.5	9	0.297	0.314	1.735	-1.624	1.894	-0.203
9	10.5	0.226	0.219	1.878	-4.685	1.833	-0.941
10.5	11	0.170	0.183	1.914	-1.782	1.647	-0.524
11	10.5	0.178	0.172	4.511	-0.471	1.431	1.331
10	11	0.346	0.169	3.000	-4.405	2.056	-0.468
11	10	0.211	0.224	-0.749	-3.169	0.620	-1.877
10	9	0.147	0.180	2.116	0.224	0.701	1.008
9	10	0.148	0.091	1.392	-1.130	0.960	0.634
11	9	0.163	0.170	1.456	-1.897	1.492	-0.588
9	11	0.200	0.212	0.990	-0.750	1.441	-1.446

Table 2. Measurement results of verification test of sensor installation angle β

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Table 2. Measurement results of verification test of sensor installation angle β

β /(°)	Δβ₁ /(°)	Δβ₂ /(°)	ΔR_2max /μm	ΔR_2min /μm	σ /μm	ΔR /μm
0	0.148	0.131	1.392	-1.130	0.960	0.634
2	0.157	0.173	1.201	-2.064	1.394	-0.656
5	0.103	0.112	2.515	-2.925	1.621	-1.352
-3	0.168	0.156	0.087	-2.420	0.743	-1.374

Table 3. Measurement results of arbitrary pose verification tests
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Table 3. Measurement results of arbitrary pose verification tests
n β₁ /(°) β₂ /(°) ΔR_2max /μm ΔR_2min /μm σ /μm ΔR /μm
0 0.148 0.131 1.392 -1.130 0.960 0.634
1 0.156 0.140 1.275 -1.278 1.127 0.556
2 0.141 0.152 1.547 -0.958 0.913 0.127
3 0.139 0.148 1.576 -0.965 0.632 0.392

Table 4. Measurement results of slider when rotating β angle
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Table 4. Measurement results of slider when rotating β angle
β /(°) Δβ₁ /(°) Δβ₂ /(°) ΔR_2max /μm ΔR_2min /μm σ /μm ΔR /μm
0 0.189 0.169 1.884 0.378 1.044 1.042
2 0.158 0.182 1.235 -0.365 0.527 0.579
5 0.152 0.179 1.396 -0.258 0.752 0.774

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Xiaoyun Xu, Yi Ou, Hutian Feng, Kai Wang, Rui Wang. Tilt Measurement of Profile Accuracy of Slider Inner Raceway[J]. Acta Optica Sinica, 2017, 37(10): 1012005

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