Fig. 1. Phenomenon of stripe Mura defect

Fig. 2. CF Glass phenomenon of stripe Mura defect after teardown

Fig. 3. R/G/B film thickness of OK area and NG area

Fig. 4. Panel ratio and glass mapping

Fig. 5. The density point data of BM film thickness and CD

Fig. 6. The SEM images of BM layer

Fig. 7. Development reaction

Fig. 8. Mechanism analysis diagram of backside exposure technology process

Fig. 9. Schematics of measurement of contact angle and measurement of static electricity

Fig. 10. Results of measurement of contact angle and measurement of static electricity

Fig. 11. Schematic of electrostatic interference

Fig. 12. Analysis diagram of undercut mechanism

Fig. 13. Parallel arrangement changed into Zigzag arrangement

Fig. 14. Cross-sectional schematic of BM after improvement