[1] [1] SHEN J, FU S, SU R, et al. High-performance surface acoustic wave devices using LiNbO3/SiO2/SiC multilayered substrates［J］.IEEE Transactions on Microwave Theory and Techniques,2021,69(8):3693-3705.

[2] [2] LU R, YANG Y, GONG S. Acoustic loss of GHz higher-order Lamb waves in thin-film lithium niobate:A comparative study［J］.Journal of Microelectromechanical Systems,2021,30(6):1-9.

[3] [3] ZOU J, YANTCHEV V, ILIEV, et al. Ultra-large-coupling and spurious-free SH0 plate acoustic wave resonators based on thin LiNbO3［J］.IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2020,67(2):374-386.

[4] [4] SU R, FU S,LU Z,et al. Over GHz bandwidth SAW filter based on 32°Y-X LN/SiO2/poly-Si/Si heterostructure with multilayer electrode modulation［J］.Applied Physics Letters,2022,25:120.

[5] [5] ZHANG Q, DU R, LI B, et al. Piezoelectric acoustic wave characteristics of Pb(In0.5Nb0.5)O3-Pb (Mg1/3-Nb2/3)O3-PbTiO3 single crystal substrate:A comparative study with and without SiO2 overlay［J］.J Appl Phys,2022,2:132.

[6] [6] MASAMUNE C, YANAGITANI T. Ion beam induced a-axis in-plane oriented c-axis oriented AlN thin film growth for high-Q BAW resonator application［C］//［S.l.］:2019 IEEE International Ultrasonics Symposium (IUS),2019:1127-1128.

[7] [7] LUO T, XU Q, WEN Z, et al. Spurious-free S1 mode AlN/ScAlN-based lamb wave resonator with trapezoidal electrodes［J］.IEEE Electron Device Letters,2023,44(4):574-577.

[8] [8] XIE Y, ZHOU J, LIU Y, et al. 6 GHz lithium niobate MEMS resonator with square spiral electrodes［C］//［S.l.］:2021 IEEE International Ultrasonics Symposium (IUS),2021:1-3.

[9] [9] LINK S, LU R, GONG S, et al. An A1 mode resonator at 12 GHz using 160 nm lithium niobate suspended thin film［C］//［S.l.］:2021 IEEE International Ultrasonics Symposium (IUS),2021:3-6.

[10] [10] YANDRAPALLI S, EROGLU E, PLESSKY V, et al. Study of thin film LiNbO3 laterally excited bulk acoustic resonators［J］.Journal of Micro-electromechanical Systems,2022,31(2):217-225.

[11] [11] LU R, YANG Y, GONG S, et al. A1 resonators in 128° Y-cut lithium niobate with electromechanical coupling of 46.4%［J］.Journal of Micro-electromechanical Systems,2020,29(3):313-319.

[12] [12] SU R, YU Z, FU S, et al. Lithium niobate thin film based A1 mode resonators with frequency up to 16 GHz and electromechanical coupling factor near 35%［C］//［S.l.］:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems(MEMS),2023:1190-1193.

[13] [13] KOSKELA J, PLESSKY V. Hierarchical cascading in FEM simulations of SAW devices［C］//［S.l.］:2018 IEEE International Ultrasonics Symposium (IUS),2018:1-11.

[14] [14] LI X, BAO J, HUANG Y, et al. Use of hierarchical cascading technique for FEM analysis of transverse mode behaviours in surface acoustic wave devices［C］//［S.l.］:2018 IEEE International Ultrasonics Symposium (IUS),2018:1-9.

[15] [15] YU Z Y, GUO Y, FU S L, et al. Research on ultra wide-band and high-frequency XBAR resonator［J］.Piezoelectrics & Acoustooptics,2022,44(5):700-703.