Fig. 1. Function of the EUV pellicle

Fig. 2. Optical constants at 13.5 nm for typical elements^[9]

Fig. 3. Example of grid supported EUV pellicle structure^[4]

Fig. 4. Process flow of SiN_x pellicle with self-assembled 3D patterns（right）, and scanning electron microscopy（SEM）images on the initial and etched pellicles（left）^[16]

Fig. 5. Factors in the optical model for transmission and scattering of carbon nanotube pellicle^[24]

Fig. 6. Fabrication processes for EUV pellicles based on SiN_x^[18]

Fig. 7. Synthesis of graphene/graphite on copper/nickel catalysts, by using CVD^[19,33]

Fig. 8. NGF growth on the Ni film/Ni foil

Fig. 9. Wet and dry transfer process for the free-standing NGF^[5]

Fig. 10. An unusual transfer process utilizing camphor as a supporting layer instead of PMMA^[34]

Fig. 11. SEM images of different CNT pellicle structures^[22]

Fig. 12. Schematic diagram of an experimental setup for the purification of CNT film^[40]

Fig. 13. CNT pellicle films supported by different types of external frames^[41]

Fig. 14. Morphology and crystal properties of carbon-based pellicle films

Fig. 15. Optical properties of carbon nanotube pellicles

Fig. 16. “Bulge tester” to measure the mechanical properties of the pellicle

Fig. 17. The influence of hydrogen plasma for different types of pellicles^[20]