A Periodic Structural Parameter Inspection Method Based on Spectrum Characteristics

Bin Song; Ning Yan; Linlin Zhu; Xiaodong Zhang

doi:10.3788/LOP57.121008

Laser & Optoelectronics Progress, Volume. 57, Issue 12, 121008(2020)

A Periodic Structural Parameter Inspection Method Based on Spectrum Characteristics

Bin Song, Ning Yan, Linlin Zhu, and Xiaodong Zhang^*

State Key Laboratory of Precision Measuring Technology & Instruments, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China

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Bin Song, Ning Yan, Linlin Zhu, Xiaodong Zhang. A Periodic Structural Parameter Inspection Method Based on Spectrum Characteristics[J]. Laser & Optoelectronics Progress, 2020, 57(12): 121008

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Paper Information

Category: Image Processing

Received: Sep. 24, 2019

Accepted: Oct. 30, 2019

Published Online: Jun. 3, 2020

The Author Email: Xiaodong Zhang (zhangxd@tju.edu.cn)

DOI:10.3788/LOP57.121008

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology