Chinese Journal of Lasers, Volume. 41, Issue 11, 1106002(2014)
Fabrication of Metal Nano Grating Mold Based on Synchrotron Radiation Lithography and Nano Electroforming Process
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Li Yigui, Sugiyama Susumu. Fabrication of Metal Nano Grating Mold Based on Synchrotron Radiation Lithography and Nano Electroforming Process[J]. Chinese Journal of Lasers, 2014, 41(11): 1106002
Paper Information
Category: Optical communication
Received: Jun. 6, 2014
Accepted: --
Published Online: Sep. 18, 2014
The Author Email: Yigui Li (ygli@sit.edu.cn)
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