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Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 299(2022)

Study on the Scandium-Doped AlN Films and HBAR Devices

ZHU Yubo1,2, MU Zhiqiang1,2, CHEN Lingli3, ZHU Lei1,2, LI Weimin1,2, and YU Wenjie1,2
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    ZHU Yubo, MU Zhiqiang, CHEN Lingli, ZHU Lei, LI Weimin, YU Wenjie. Study on the Scandium-Doped AlN Films and HBAR Devices[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 299

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    Special Issue:

    Received: Mar. 30, 2022

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.02.030

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology