Acta Optica Sinica, Volume. 34, Issue 7, 712003(2014)
A Fast Method for Calculating the Thermal Effect in Projection Objective Lenses
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Luo Cong, Gong Yan. A Fast Method for Calculating the Thermal Effect in Projection Objective Lenses[J]. Acta Optica Sinica, 2014, 34(7): 712003
Category: Instrumentation, Measurement and Metrology
Received: Feb. 18, 2014
Accepted: --
Published Online: May. 19, 2014
The Author Email: Cong Luo (luocong@foxmail.com)