Laser Technology, Volume. 48, Issue 6, 832(2024)

128-channel OPA based on SiN slab waveguide grating antenna

MA Pengfei1,2, YU Lei1,2, WANG Zheng1,2, WANG Pengfei1,2, ZHANG Yejin1,2, and PAN Jiaoqing1,2、*
Author Affiliations
  • 1Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2College of Materials Science and Opto-electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    MA Pengfei, YU Lei, WANG Zheng, WANG Pengfei, ZHANG Yejin, PAN Jiaoqing. 128-channel OPA based on SiN slab waveguide grating antenna[J]. Laser Technology, 2024, 48(6): 832

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    Paper Information

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    Received: Dec. 31, 2023

    Accepted: Feb. 13, 2025

    Published Online: Feb. 13, 2025

    The Author Email: PAN Jiaoqing (jqpan@semi.ac.cn)

    DOI:10.7510/jgjs.issn.1001-3806.2024.06.008

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