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OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 19, Issue 2, 108(2021)

Analysis of Film Thickness Uniformity of Large-Diameter Aluminum Film Deposited by Thermal Evaporation

FAN Yan-zheng, PAN Yong-qiang*, LIU Jin-ze, and ZHANG Da
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    [1] [1] Sheikh D A， Connell S J， Dummer R S. Durable silver coating for Kepler Space Telescope primary mirror［C］. Proc.SPIE： 2008，7010： 70104E.

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    FAN Yan-zheng, PAN Yong-qiang, LIU Jin-ze, ZHANG Da. Analysis of Film Thickness Uniformity of Large-Diameter Aluminum Film Deposited by Thermal Evaporation[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2021, 19(2): 108

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    Paper Information

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    Received: Oct. 22, 2020

    Accepted: --

    Published Online: Aug. 23, 2021

    The Author Email: Yong-qiang PAN (pyq_867@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology