OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 19, Issue 2, 108(2021)
Analysis of Film Thickness Uniformity of Large-Diameter Aluminum Film Deposited by Thermal Evaporation
The uniformity of the film thickness of the aluminum film deposited by the thermal evaporation of the 1.1 m large-diameter coating machine is studied. For the rotating plane fixture, the influence of the fixture height H and the distance L between the evaporation source and the central axis of the vacuum chamber on the uniformity of the aluminum film thickness is analyzed. When L=400 mm and H/L=1.10, the film thickness uniformity is the best, the unevenness is 9.614%, and the unevenness increases as the value of H/L increases. When H=500 mm and H/L=1.47, the film thickness uniformity is the best, the unevenness is 4.487%, and the unevenness increases as the value of H/L decreases. Furthermore, a modified baffle function is introduced, and a suitable correction mask is proposed and designed. The film thickness uniformity is improved from 17.8% without the correction mask to 3.9%, thereby solving the problem of aluminum film thickness uniformity.
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FAN Yan-zheng, PAN Yong-qiang, LIU Jin-ze, ZHANG Da. Analysis of Film Thickness Uniformity of Large-Diameter Aluminum Film Deposited by Thermal Evaporation[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2021, 19(2): 108
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Received: Oct. 22, 2020
Accepted: --
Published Online: Aug. 23, 2021
The Author Email: Yong-qiang PAN (pyq_867@163.com)
CSTR:32186.14.