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Chinese Journal of Lasers, Volume. 28, Issue 3, 272(2001)

Preparation of Aluminum Nitride Films Using Pulsed Laser Deposition

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preparation of Aluminum Nitride Films Using Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2001, 28(3): 272

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    Paper Information

    Category: laser manufacturing

    Received: Oct. 8, 1999

    Accepted: --

    Published Online: Aug. 10, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology