Chinese Journal of Lasers, Volume. 29, Issue s1, 418(2002)

Research on the Photoresist Action in Fabrication of Binary Optical Elements

KONG Ling-bin1,2, YI Xin-jian1, WANG Dian-hong2, CHEN Si-hai1, and HUANG Guang3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(3)

    [1] [1] Chen Sihai, Yi Xinjian, Li Yi et al.. Design of diffractive microlens arrays integration with focal plane arrays. Proc. SP/E, 2000, 4224:170~173

    [2] [2] Chen Sihai, Yi Xinjian, He Miao et al.. Research on hybrid device of Si microlens arrays with long focus and IR detector arrays. 25th International Conference on Infrared and Millimeter Waves., 2000:147~148

    [3] [3] Chen Sihai, Yi Xinjian, Li Yi et al.. Research on hybrid device of Si microlens arrays with long focus and IR detector arrays. International Journal of I ifrarecl and Millimeter Waves., 2001,22:383~388

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    KONG Ling-bin, YI Xin-jian, WANG Dian-hong, CHEN Si-hai, HUANG Guang. Research on the Photoresist Action in Fabrication of Binary Optical Elements[J]. Chinese Journal of Lasers, 2002, 29(s1): 418

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    Paper Information

    Category: laser devices and laser physics

    Received: --

    Accepted: --

    Published Online: Feb. 23, 2013

    The Author Email:

    DOI:

    CSTR:32186.14.

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