Fig. 1. Synchronous phase-shifting shearing interferometry based on PG splitting used to measure transmitted wavefront

Fig. 2. Synchronous phase-shifting shearing interference scheme based on PG splitting used to measure surface shape of optical elements

Fig. 3. Reflective transverse shear structure composed of PG and PM

Fig. 4. Experimental device diagram for measuring transmitted wavefront

Fig. 5. Experimental shear interferograms. (a) x-direction shear interferograms; (b) y-direction shear interferograms

Fig. 6. Restored difference wavefront diagrams. (a) x-direction difference wavefront diagram; (b) y-direction difference wavefront diagram

Fig. 7. Reconstructed wavefront maps to be measured. (a) Three-dimensional map of wave surface to be measured; (b) two-dimensional map of wave surface to be measured

Fig. 8. Measurement results of SID4 wavefront sensor for transmitted wavefront

Fig. 9. PV and RMS values obtained by repeatedly measuring the transmitted wavefront. (a) PV value; (b) RMS value

Fig. 10. Experimental device diagram for measuring surface shape of optical elements

Fig. 11. Experimental shear interferograms. (a) x-direction shear interferograms; (b) y-direction shear interferograms

Fig. 12. Restored difference wavefront diagrams. (a) x-direction difference wavefront diagram; (b) y-direction difference wavefront diagram

Fig. 13. Reconstructed wavefront maps to be measured. (a) Three-dimensional map of wave surface to be measured; (b) two-dimensional map of wave surface to be measured

Fig. 14. Measurement results of SID4 wavefront sensor for reflected wavefront

Fig. 15. PV and RMS values obtained by repeatedly measuring reflected wavefront. (a) PV value; (b) RMS value

Fig. 16. Relationship between reconstruction error and shear amount

Fig. 17. Relationship between reconstruction error and shear calibration error