Laser & Optoelectronics Progress, Volume. 62, Issue 7, 0725001(2025)
Research on Influence of Spatial Resolution in EBCMOS Proximity Region
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Fig. 2. Distribution of photoelectrons bombarding on the surface of BSB-CMOS and the corresponding LSF curve
Fig. 3. Distribution of photoelectrons on the surface of BSB-CMOS under different illuminations, illustrations are 3D simulation diagrams of electron trajectories. (a) 0.1 lux; (b) 1.0 lux; (c) 10.0 lux; (d) 100.0 lux
Fig. 4. LSF and MTF curves corresponding to different illuminances. (a) LSF curves, illustration is enlarged view; (b) MTF curves
Fig. 5. Distribution of photoelectrons on the surface of BSB-CMOS under different proximity voltages, illustrations are 3D simulation diagrams of electron trajectories. (a) 1500 V; (b) 2000 V; (c) 2500 V; (d) 3000 V
Fig. 6. LSF and MTF curves corresponding to different proximity voltages. (a) LSF curves; (b) MTF curves
Fig. 7. Distribution of photoelectrons bombarding on the surface of BSB-CMOS under different proximity distances, illustrations are 3D simulation diagrams of electron trajectories. (a) 100 μm; (b) 300 μm; (c) 500 μm; (d) 700 μm
Fig. 8. LSF and MTF curves corresponding to different proximity distances. (a) LSF curves; (b) MTF curves
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Bei Jiang, Jiatong Zheng, De Song, Weijun Chen. Research on Influence of Spatial Resolution in EBCMOS Proximity Region[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0725001
Paper Information
Category: OPTOELECTRONICS
Received: Nov. 8, 2024
Accepted: Dec. 2, 2024
Published Online: Mar. 21, 2025
The Author Email: De Song (songde614@163.com), Weijun Chen (chenweijun@cust.edu.cn)
CSTR:32186.14.LOP242243
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