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Journal of Synthetic Crystals, Volume. 52, Issue 5, 805(2023)

Laser Lift-Off Process of GaN-Based Micro LED Chip with High Yield and Flatness

YUE Long1,2, XU Yu2,3, WANG Jianfeng2,3,4, and XU Ke2,3,4
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    YUE Long, XU Yu, WANG Jianfeng, XU Ke. Laser Lift-Off Process of GaN-Based Micro LED Chip with High Yield and Flatness[J]. Journal of Synthetic Crystals, 2023, 52(5): 805

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    Paper Information

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    Received: Feb. 20, 2023

    Accepted: --

    Published Online: Jun. 11, 2023

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology