In this study, a large area laser lift-off (LLO) of GaN-based micro light-emitting diodes (Micro LED) was achieved using an excimer laser at 248 nm. The critical laser energy density required for separation of devices is 800~835 mJ·cm-2. The separated device is intact with a residual stress of 0.071 4 GPa and a mean square roughness of 0.597 nm, which is much lower than that of the LLO method reported so far. This study provides a promising idea for the fabrication of GaN-based Micro LED chips with high quality and high efficiency, which is of great significance for the fabrication of flexible GaN-based devices.