[1] [1] Zheng Zhengrong, Gu Perfu, Chen Haixing et al.. Design and preparation of super broadband antireflection coating［J］. Acta Optica Sinica, 2009, 29(7): 2026～2029

[2] [2] Qiu Mingbo, Huang Yinhui, Liu Zhidong et al.. Numerical study on effect of silicon texture structure on reflectance of light［J］. Acta Optica Sinica, 2008, 28(12): 2394～2399

[3] [3] M. A. Sheehy, L. Winston, J. C. Carey et al.. Role of the background gas in the morphology and optical properties of laser-microstructured silicon［J］. Chem. Mater., 2005, 17(14): 3582～3586

[4] [4] T. H. Her, R. J. Finlay, C. Wu et al.. Microstructuring of silicon with femtosecond laser pulses［J］. Appl. Phys. Lett., 1998, 73(12): 1673～1675

[5] [5] L. L. Ma, Y. C. Zhou, N. Jiang et al.. Wide-band “black silicon” based on porous silicon［J］. Appl. Phys. Lett., 2006, 88(17): 171907

[6] [6] C. C. Striemer, P. M. Fauchet. Dynamic etching of silicon for broadband antireflection applications［J］. Appl. Phys. Lett., 2002, 81(16): 2980～2981

[7] [7] S. Strehlke, S. Bastide, J. Guillet. Design of porous silicon antireflection coatings for silicon solar cells［J］. Mater. Sci. Engng., 2000, 69-70(14): 81～86

[8] [8] Guo Chucai, Ye Weimin, Yuan Xiaodong et al.. Research on reflection characteristics of sub-wavelength gratings［J］. Acta Optica Sinica, 2009, 29(12): 3272～3276

[9] [9] Fan Shuwei, Zhou Qinghua, Li Hong. Research of optimization design of groove diffraction grating profile parameters［J］. Acta Optica Sinica, 2010, 30(11): 3133～3139

[10] [10] Zheng Zhimin, Ding Tianhuai, Zhang Jianfu. Characteristics of aperture-array diffraction and its application［J］. Acta Optica Sinica, 2006, 26(2): 294～299

[11] [11] Wang Fei, Yu Hongyu, Li junshuai et al.. Optical absorption enhancement in nanopore textured-silicon thin film for photovoltaic application［J］. Opt. Lett., 2010, 35(1): 40～42

[12] [12] Chen Sihai, Cheng Zhijun, Huang Guang et al.. Design and fabrication of subwavelength antireflection gratings［J］. Acta Optica Sinica, 2003, 23(11): 1359～1361

[13] [13] Li Junshuai, Yu Hongyu, Wong Shemein et al.. Design guidelines of periodic Si nanowire arrays for solar cell application［J］. Appl. Phys. Lett., 2009, 95(24): 243113

[14] [14] P. Lalanne, D. Lemericier-Lalanne. On the effective medium theory of subwavelength periodic structures［J］. Modern Opt., 1996, 43(10): 2063～2085

[15] [15] Zhang Zequan, Huang Yuanshen, Zhuang Songlin et al.. Diffraction efficiency of sub-wavelength gratings［J］. Chinese J. Scientific Instrument, 2007, 28(4): 587～592

[16] [16] Cao Zhaoliang, Lu Zhenwu, Li Fengyou et al.. Design consideration of two-dimensional anti-reflective subwavelength periodic gratings［J］. Opt. & Precision Engng., 2002, 10(6): 537～541