Acta Optica Sinica, Volume. 43, Issue 10, 1012002(2023)
Influence of Mechanical Deformation of Off-Axis Optical Path on Coupling Efficiency in 3D Micro-Vibration Measurement
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Hui Dong, Dayong Wang, Xinxin Kong, Yunxin Wang. Influence of Mechanical Deformation of Off-Axis Optical Path on Coupling Efficiency in 3D Micro-Vibration Measurement[J]. Acta Optica Sinica, 2023, 43(10): 1012002
Category: Instrumentation, Measurement and Metrology
Received: Nov. 10, 2022
Accepted: Dec. 30, 2022
Published Online: May. 9, 2023
The Author Email: Yunxin Wang (yxwang@bjut.edu.cn)