Acta Optica Sinica, Volume. 43, Issue 10, 1012002(2023)

Influence of Mechanical Deformation of Off-Axis Optical Path on Coupling Efficiency in 3D Micro-Vibration Measurement

Hui Dong1, Dayong Wang2, Xinxin Kong3, and Yunxin Wang2、*
Author Affiliations
  • 1Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China
  • 2Faculty of Science, Beijing University of Technology, Beijing 100124, China
  • 3Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing 100094, China
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    Hui Dong, Dayong Wang, Xinxin Kong, Yunxin Wang. Influence of Mechanical Deformation of Off-Axis Optical Path on Coupling Efficiency in 3D Micro-Vibration Measurement[J]. Acta Optica Sinica, 2023, 43(10): 1012002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 10, 2022

    Accepted: Dec. 30, 2022

    Published Online: May. 9, 2023

    The Author Email: Yunxin Wang (yxwang@bjut.edu.cn)

    DOI:10.3788/AOS221963

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