[3] [3] HYUNG-KEW L,SUN-IL C,EUISIK Y.A flexible polymer tactile sensor:Fabrication and modular expandability for large area deployment［J］.Journal of Microelectromechanical Systems:A Joint IEEE and ASME Publication on Microstructures,Microactuators,Microsensors,and Microsystems, 2006,15(6):1681-1686.

[4] [4] PERLA M,MARCO M,GIORGIO C,et al.A flexible and robust large scale capacitive tactile system for robots［J］.IEEE Sensors Journal,2013,13(10):3910-3917.

[5] [5] LIANG G,WANG Y,MEI D,et al.Flexible capacitive tactile sensor array with truncated pyramids as dielectric layer for three-axis force measurement［J］.Journal of Microelectromechanical Systems:A Joint IEEE and ASME Publication on Microstructures,Microactuators,Microsensors,and Microsystems,2015,24(5):1510-1519.

[6] [6] SOMEYA T,SEKITANI T,IBA S,et al.A large-area,flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications.［J］.Proceedings of the National Academy of Sciences of the United States of America,2004,101(27):9966-9970.

[7] [7] PAN L,CHORTOS A,YU G,et al.An ultra-sensitive resistive pressure sensor based on hollow-sphere microstructure induced elasticity in conducting polymer film.［J］.Nature communications,2014,5(1):3002.

[9] [9] HOSODA K,TADA Y,ASADA M.Anthropomorphic robotic soft fingertip with randomly distributed receptors［J］.Robotics and Autonomous Systems,2005,54(2):104-109.

[10] [10] DAHIYA R S,VALLE M,METTA G,et al.Tactile sensing arrays for humanoid robots using piezo-polymer-FET devices［C］//Italian: 13th National Conference on Sensors and Microsystems,IEEE,2015:301-306.

[11] [11] DAHIYA R S,VALLE M,METTA G,et al.Bio-inspired tactile sensing arrays［C］//［S.l.］:Conference on Bioengineered & Bioinspired Systems IV, 2009,7365:1-9.

[12] [12] GUO J,ZHOU B,ZONG R,et al.Stretchable and highly sensitive optical strain sensors for human-activity monitoring and healthcare［J］.ACS Applied Materials & Interfaces,2019,11(37):33589-33598.

[14] [14] MARKUS R,MINH L,FRANK C.Textile pressure sensor made of flexible plastic optical fibers［J］.Sensors,2008,8(7):4318-4329.

[15] [15] BODKH S,TURCOT G,GOSSELIN F P,et al.One-step solvent evaporation-assisted 3D printing of piezoelectric PVDF nanocomposite structures［J］.ACS Applied Materials & Interfaces,2017,9(24):20833-20842.

[16] [16] WANG X,YANG B,LIU J,et al.A flexibletriboelectric-piezoelectric hybrid nanogenerator based on P(VDF-TrFE) nanofibers and PDMS/MWCNT for wearable devices［J］.Scientific Reports,2016,6:36409.

[17] [17] LI J,WANG C,LIU M.Design and fabrication of a novel PZT films based piezoelectric micromachined ultrasonic transducers［C］//Zhangjiajie,China: Measuring Technology and Mechatronics Automation,2009,2:45-49.

[18] [18] KIM S H,YANG J S,KOO C Y,et al.Dielectric and electromechanical properties of Pb(Zr,Ti)O3 thin films for piezo-microelectromechanical system devices［J］.Jpn J Appl Phys,2003,42(9B):5952-5955.

[19] [19] KIM S H,KOO C Y,HA S M,et al.Thickness scaling of Pb(Zr,Ti)O3 thin films and Pt electrodes for high density FeRAM devices［J］.Integrated Ferroelectrics,2002,48(1):139-147.

[20] [20] MARDARE A I,MARDARE C C,JOANNI E.Bottom electrode crystallization of PZT thin films for ferroelectric capacitors［J］.Journal of the European Ceramic Society,2005,25(5):735-741.

[21] [21] ZHOU Q,LAU S,WU D,et al.Piezoelectric films for high frequency ultrasonic transducers in biomedical applications［J］.Progress in Materials Science,2011,56(2):139-174.

[23] [23] LARSON C,PEELE B,LI S,et al.Highly stretchable electroluminescent skin for optical signaling and tactile sensing［J］.Science,2016,351(6277):1071-1074.

[27] [27] BUDD K D,DEY S K,PAYNE D A.Sol-Gel processing of PbTiO3,PbZrO3,PZT,and PLZT thin films［J］.British Ceramic Proceedings,1985,36:107-121.

[28] [28] PHILIPP E,LLEVILLE B,JANIC K,et al.Stable PZT sol for preparing reproducible high-permittivity perovskite-based thin films［J］.Journal of Sol-Gel Science & Technology, 2007,43(2):213-221.

[29] [29] DAUCHY F,DOREY R A.Patterned crack-free PZT thick films for micro-electromechanical system applications［J］.International Journal of Advanced Manufacturing Technology,2007,33(1):86-94.

[30] [30] AKEDO J,PARK J,TSUDA H.Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist［J］.Journal of Electroceramics,2009,22(1/3):319-326.

[31] [31] HAHN B D,KIM K H,PARK D S,et al.Fabrication of lead zirconate titanate thick films using a powder containing organic residue［J］.Jpn J Appl Phys,2008,47(7):5545-5552.

[32] [32] HAHN B D,PARK D S,CHOI J J,et al.Effects of Zr/Ti ratio and post-annealing temperature on the electrical properties of lead zirconate titanate (PZT) thick films fabricated by aerosol deposition［J］.Gas Wasser Abwasser,2008,23(1):226-235.

[33] [33] CHOI J J,HAHN B D,RYU J,et al.Effects of Pb(Zn1/3Nb2/3)O3 addition and post-annealing temperature on the electrical properties of Pb(ZrxTi1-x)O3 thick films prepared by aerosol deposition method［J］.J Appl Phys,2007,102(4):59-300.

[34] [34] KANDA T,KUROSAWA M K,YASUI H,et al.Performance of hydrothermal PZT film on high intensity operation［J］.Sensors & Actuators A:Physical, 2001,89(1):16-21.

[35] [35] ISHIKAWAM,KUROSAWA M,KATSURA N,et al.PZT thick films deposited by improved hydrothermal method for thickness mode ultrasonic transducer［J］.MRS Online Proceeding Library Archive,2011,784:C11.27.1-C11.27.5.

[37] [37] WASAK,ADACHI H,NISHIDA K,et al.Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O3-PZT thin films［J］.IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control,2012,59(1):6-13.

[38] [38] ZHAO H,LIU X,REN W,et al.Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays—Science direct［J］.Ceramics International,2018,44:S7-S10.

[41] [41] SAPPATI K K,BHADRA S.Flexible piezoelectric 0-3 PZT-PDMS thin film for tactile sensing［J］.IEEE Sensors Journal,2020,20(9):4610-4617.

[42] [42] KHANBAREH H,DE BOOM K,SCHELEN B,et al.Large area and flexible micro-porous piezoelectric materials for soft roboticskin［J］.Sensors & Actuators A Physical,2017,263:554-562.

[43] [43] ACER M,YILDIZ A F,BAZZAZ F H.Development of a soft PZT based tactile sensor array for force localization［C］//Sarajevo,Bosnia and Herzegovina: XXVI International Conference on Information,IEEE,2017:1-6.

[44] [44] LIU Y,ZHAO L,WANG L,et al.Skin-integrated graphene-embedded lead zirconate titanate rubber for energy harvesting and mechanical sensing［J］.Advanced Materials Technologies,2019,4(12):1-9.

[46] [46] LIU Y,ZHENG H,ZHAO L,et al.Electronic skin from high-throughput fabrication of intrinsically stretchable lead zirconate titanate elastomer［J］.Research,2020,2020(1):1-11.

[47] [47] RUAN X,CHAI R,ZHANG X,et al.The preparation and experiment of a flexible array pressure sensor based on CNTs/PDMS composites［J］.Chinese Journal of Sensors and Actuators,2018,31(10):1505-1510.

[49] [49] LAN Lingxiang, CHI Mingmin. remote sensing change detection based on feature fusion and attention network［J］. Computer Science,2022,49(6):193-198.

[51] [51] CHENG Xiangming,DENG Chunhua. compression algorithm of face recognition model based on unlabeled knowledge distillation［J］. Computer Science,2022,49(6):245-253.

[52] [52] CHEN Y Q,LI Y X,CHEN Y,et al.Large-scale and high-densitypmut array based on isolated Sol-Gel PZT membranes for fingerprint imaging［J］.Journal of the Electrochemical Society,2017,164(7):B377-B381.

[53] [53] LU Chaofeng, WU Shuang, LU Bingwei,et al.Ultrathin flexible piezoelectric sensors for monitoring eye fatigue［J］.Journal of Micromechanics and Microengineering,2018,28(2):025010.

[54] [54] ZHU M,SHI Q,HE T,et al.Self-powered and self-functional cotton sock using piezoelectric and triboelectric hybrid mechanism for healthcare and sports monitoring［J］.ACS Nano,2019,13(2):1940-1952.

[55] [55] YUN Y,WANG Y,GUO H,et al.A resonant tactile stiffness sensor for lump localization in robot-assisted minimally invasive surgery［J］.Proceedings of the Institution of Mechanical Engineers Part H Journal of Engineering in Medicine,2019,233(9):1571266061.

[56] [56] LU B,CHEN Y,OU D,et al.Ultra-flexible piezoelectric devices integrated with heart to harvest the biomechanical energy［J］.Rep,2015,5:16065.

[57] [57] ZHU M,SUN Z,ZHANG Z,et al.Haptic-feedback smart glove as a creative human-machine interface (HMI) for virtual/augmented reality applications［J］.Science Advances,2020,6(19):8693.

[58] [58] YI Z,YANG H,TIAN Y,et al.Self-powered force sensor based on thinned bulk PZT for real-time cutaneous activities monitoring［J］.Wearable Sensors,2018,39(8):1226-1229.

[59] [59] CHEN Jingnian. Acceleration of SVM for multi-class classification［J］.Computer Science, 2022,49(6A):297-300.