Bilinear interpolation fitting calibration of two-dimensional large angle fast steering mirror

JI Jia-qi; LIU Yang

doi:10.3969/j.issn.1001-5078.2024.11.014

Laser & Infrared, Volume. 54, Issue 11, 1737(2024)

Bilinear interpolation fitting calibration of two-dimensional large angle fast steering mirror

JI Jia-qi and LIU Yang^*

School of Instrument Science and Optoelectronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China

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References(4)

[3] [3] Xiao R, Xu M, Shao S, et al. Design and wide-bandwidth control of large aperture fast steering mirror with integrated-sensing unit[J]. Mechanical Systems and Signal Processing, 2019, 126: 211-226.

[7] [7] Dziczkowski Leszek, Tytko Grzegorz. Evaluation of the properties of eddy current sensors based on their equivalent parameters[J]. Sensors, 2023, 23(6): 3267.

[8] [8] Qu Z, Zhao Q, Meng Y. Improvement of sensitivity of eddy current sensors for nano-scale thickness measurement of Cu films[J]. NDT & E International, 2014, 61: 53-56.

[18] [18] Qu Zilian, Zhao Qian, Meng Yonggang. Improvement of sensitivity of eddy current sensors for nano-scale thickness measurement of Cu films[J]. NDT & E International, 2014, 61: 53-57.

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JI Jia-qi, LIU Yang. Bilinear interpolation fitting calibration of two-dimensional large angle fast steering mirror[J]. Laser & Infrared, 2024, 54(11): 1737

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Paper Information

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Received: Dec. 26, 2023

Accepted: Jan. 14, 2025

Published Online: Jan. 14, 2025

The Author Email: LIU Yang (20141891@bistu.edu.cn)

DOI:10.3969/j.issn.1001-5078.2024.11.014

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology