Laser & Optoelectronics Progress, Volume. 59, Issue 2, 0212001(2022)

Measurement of Wavefront Aberration of Lens Based on Phase Measuring Deflectometry

Jinrui Gao1... Dahai Li1,2,*, Heng Lai1, Xinwei Zhang1, Ruiyang Wang1 and Yilang Ruan1 |Show fewer author(s)
Author Affiliations
  • 1College of Electronics and Information Engineering, Sichuan University, Chengdu , Sichuan 610065, China
  • 2College of Aeronautics and Astronautics, Sichuan University, Chengdu , Sichuan 610065, China
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    Figures & Tables(13)
    Optical paths of ideal imaging and actual imaging of single lens
    Optical paths of ideal imaging and actual imaging of reverse ray tracing
    Schematic diagram of the prism model
    Optical path diagram of the prism model. (a) Ray tracing; (b) reverse ray tracing
    Optical path diagram of incident parallel light
    Simulation results of ray tracing. (a) Apex angles of the prisms in the horizontal direction on the x-axis; (b) angular aberration of ray tracing; (c) angular aberration of reverse ray tracing; (d) δx-δRx
    Wavefront aberration obtained by ray tracing. (a) Angular aberration in the horizontal direction of ray tracing; (b) angular aberration in the vertical direction of reverse ray tracing; (c) wavefront aberration of ray tracing; (d) wavefront aberration of reverse ray tracing; (e) W-WR
    Top view of the experimental setup
    Fringe patterns in experiment. (a) Patterns with lens; (b) patterns without lens
    Schematic diagram of calculating δR
    False-color plots of the measurement results of different methods. (a) Zernike 4 terms removed; (b) Zernike 10 terms removed; (c) Zernike 11 terms removed
    • Table 1. Comparison of wavefront aberrations

      View table

      Table 1. Comparison of wavefront aberrations

      ParameterWWRWWR
      RMS1.26711.26715.6281×10-8
      PV4.20174.20172.8507×10-7
    • Table 2. RMS and PV of measurement results of different methods

      View table

      Table 2. RMS and PV of measurement results of different methods

      ParameterAfter 4 terms removedAfter 10 terms removedAfter 11 terms removed
      RMSPVRMSPVRMSPV
      Experiment0.9793.8240.9703.3770.0190.167
      Interferometer0.9123.5310.9093.4140.0420.418
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    Jinrui Gao, Dahai Li, Heng Lai, Xinwei Zhang, Ruiyang Wang, Yilang Ruan. Measurement of Wavefront Aberration of Lens Based on Phase Measuring Deflectometry[J]. Laser & Optoelectronics Progress, 2022, 59(2): 0212001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 20, 2021

    Accepted: Mar. 4, 2021

    Published Online: Dec. 23, 2021

    The Author Email: Li Dahai (lidahai@scu.edu.cn)

    DOI:10.3788/LOP202259.0212001

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