Chinese Optics Letters, Volume. 11, Issue s1, S10213(2013)
Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates
[1] [1] M. Gross, S. Dligatch, and A. Chtanov, Appl. Opt. 50, C316 (2011).
[2] [2] S. Dligatch, M. Gross, and A. Chtanov, Proc. SPIE 8168, 816803 (2011).
[3] [3] J. B. Oliver and D. Talbot, Appl. Opt. 45, 3097 (2006).
[4] [4] B. S. Ramprasad and T. S. Radha, Thin Solid Films 15, 55 (1973).
[5] [5] K. H. Behrndt, in Transactions of the Tenth National Vacuum Symposium of the American Vacuum Society, G. H. Bancroft, ed. (Macmillan, 1963).
[6] [6] C. Liu, M. Kong, C. Guo, W. Gao, and B. Li, Opt. Express 20, 23790 (2012).
[7] [7] H. A. Macleod, Thin-film Optical Filters (Academic Press, New York, 2001), p.488-497.
[8] [8] B. Sassolas , Q. Benoit, R. Flaminio, D. Forest, J. Franc, M. Galimberti, A. Lacoudre, C. Michel, J. L. Montorio, N. Morgado, and L. Pinard, Proc. SPIE 8168, 81681Q (2011).
[9] [9] H. H. Bauer, M. Heller, and N. Kaiser, Proc. SPIE 2776, 353 (1995).
[10] [10] P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7606, 706708 (2008).
[11] [11] A. Perrin and J.P. Gailliard, Proc. SPIE 1782, 238 (1992).
[12] [12] F. Wang, R. Crocker, and R. Faber, in Proceedings of Optical Interference Coatings MB, MB3 (2010).
[13] [13] L. Holland and W. Steckelmacher, Vacuum 2, 346 (1952).
[14] [14] F. Villa and O. Pompa, Appl. Opt. 38, 695 (1999).
[15] [15] C. C. Jaing, Appl. Opt. 50, C159 (2011).
[16] [16] C. Zaczek, A. Pazidis, and H. Feldermann , in Proceedings of Optical Interference Coatings FA, FA1 (2007).
Get Citation
Copy Citation Text
Cunding Liu, Chun Guo, Mingdong Kong, Bincheng Li, "Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates," Chin. Opt. Lett. 11, S10213 (2013)
Category: Deposition and process control
Received: Dec. 24, 2012
Accepted: Jan. 15, 2013
Published Online: May. 30, 2013
The Author Email: