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Chinese Journal of Lasers, Volume. 51, Issue 23, 2313001(2024)

Mechanism of Nanosecond and Picosecond Laser-Induced Periodic Structures Assisted by Prefabricated Structures on Single-Crystal Germanium Surfaces

Han Dai, Bing Han*, Jing Zhang, Yanshuo Liu, and Renjie Wang
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu , China
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    Simulation model of grating structure prefabricated on single-crystal germanium surface. (a) Schematic of cross section; (b) 3D model

    Fig. 1. Simulation model of grating structure prefabricated on single-crystal germanium surface. (a) Schematic of cross section; (b) 3D model

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    Carrier-lattice temperature variation curves under laser irradiation with different pulse widths. (a) Under picosecond laser irradiation with pulse width of 8 ps; (b) under nanosecond laser irradiation with pulse width of 7 ns

    Fig. 2. Carrier-lattice temperature variation curves under laser irradiation with different pulse widths. (a) Under picosecond laser irradiation with pulse width of 8 ps; (b) under nanosecond laser irradiation with pulse width of 7 ns

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    Temperature distributions of prefabricated single-crystal germanium surface structures. (a) Energy density of 0.12 J/cm2 and pulse width of 7 ns; (b) energy density of 0.12 J/cm2 and pulse width of 8 ps; (c) energy density of 0.13 J/cm2 and pulse width of 7 ns; (d) energy density of 0.13 J/cm2 and pulse width of 8 ps; (e) energy density of 0.14 J/cm2 and pulse width of 7 ns; (f) energy density of 0.14 J/cm2 and pulse width of 8 ps

    Fig. 3. Temperature distributions of prefabricated single-crystal germanium surface structures. (a) Energy density of 0.12 J/cm2 and pulse width of 7 ns; (b) energy density of 0.12 J/cm2 and pulse width of 8 ps; (c) energy density of 0.13 J/cm2 and pulse width of 7 ns; (d) energy density of 0.13 J/cm2 and pulse width of 8 ps; (e) energy density of 0.14 J/cm2 and pulse width of 7 ns; (f) energy density of 0.14 J/cm2 and pulse width of 8 ps

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    Comparison of fused layers when nanosecond and picosecond lasers irradiate prefabricated single-crystal germanium surface structures

    Fig. 4. Comparison of fused layers when nanosecond and picosecond lasers irradiate prefabricated single-crystal germanium surface structures

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    Simulation models of electric fields when laser with energy density of 0.14 J/cm2 irradiates prefabricated structure. (a) Under nanosecond laser action; (b) under picosecond laser action

    Fig. 5. Simulation models of electric fields when laser with energy density of 0.14 J/cm2 irradiates prefabricated structure. (a) Under nanosecond laser action; (b) under picosecond laser action

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    Electric field distributions when groove width of prefabricated grating is 350 nm. Electric field spatial distributions of grating under (a) (d) (g) nanosecond laser and (b) (e) (h) picosecond laser irradiation; (c) (f) (i) electric field intensity distributions of ridges and grooves

    Fig. 6. Electric field distributions when groove width of prefabricated grating is 350 nm. Electric field spatial distributions of grating under (a) (d) (g) nanosecond laser and (b) (e) (h) picosecond laser irradiation; (c) (f) (i) electric field intensity distributions of ridges and grooves

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    Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths when energy density is 0.12 J/cm2. (a) 525 nm; (b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

    Fig. 7. Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths when energy density is 0.12 J/cm2. (a) 525 nm; (b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

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    Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths when energy density is 0.13 J/cm2. (a) 525 nm;(b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

    Fig. 8. Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths when energy density is 0.13 J/cm2. (a) 525 nm;(b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

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    Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths when energy density is 0.14 J/cm2. (a) 525 nm; (b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

    Fig. 9. Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths when energy density is 0.14 J/cm2. (a) 525 nm; (b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

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    Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths under nanosecond laser irradiation .(a) 525 nm;(b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

    Fig. 10. Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths under nanosecond laser irradiation .(a) 525 nm;(b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

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    Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths under picosecond laser irradiation. (a) 525 nm; (b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

    Fig. 11. Electric field intensity distributions at bottoms of single-crystal germanium grooves with different groove widths under picosecond laser irradiation. (a) 525 nm; (b) 700 nm; (c) 875 nm; (d) 1050 nm; (e) 1225 nm; (f) 1400 nm; (g) 1575 nm; (h) 1750 nm

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    Temperature distribution of prefabricated grating on surface of single-crystal germanium versus height. (a) Grating height of 50 nm; (b) grating height of 100 nm; (c) grating height of 150 nm; (d) grating height of 200 nm; (e) grating height of 300 nm; (f) grating height of 500 nm

    Fig. 12. Temperature distribution of prefabricated grating on surface of single-crystal germanium versus height. (a) Grating height of 50 nm; (b) grating height of 100 nm; (c) grating height of 150 nm; (d) grating height of 200 nm; (e) grating height of 300 nm; (f) grating height of 500 nm

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    Comparison of electric field distributions on bottom surfaces of grooves under different prefabricated grating heights. (a) Grating height of 50 nm; (b) grating height of 100 nm; (c) grating height of 150 nm; (d) grating height of 200 nm; (e) grating height of 300 nm; (f) grating height of 500 nm

    Fig. 13. Comparison of electric field distributions on bottom surfaces of grooves under different prefabricated grating heights. (a) Grating height of 50 nm; (b) grating height of 100 nm; (c) grating height of 150 nm; (d) grating height of 200 nm; (e) grating height of 300 nm; (f) grating height of 500 nm

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    Comparison of electric field distributions on bottom surface of grooves under different pre-fabricated grating duty cycles. (a) d=525 nm; (b) d=700 nm; (c) d=875 nm; (d) d=1050 nm; (e) d=1225 nm; (f) d=1400 nm; (g) d=1575 nm; (h) d=1750 nm

    Fig. 14. Comparison of electric field distributions on bottom surface of grooves under different pre-fabricated grating duty cycles. (a) d=525 nm; (b) d=700 nm; (c) d=875 nm; (d) d=1050 nm; (e) d=1225 nm; (f) d=1400 nm; (g) d=1575 nm; (h) d=1750 nm

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    Effect of wavelength of incident laser on intensity of optical field. (a) (c)Spatial electric field distributions of prefabricated grating;(b) (d) electric field intensity distributions of ridges and grooves

    Fig. 15. Effect of wavelength of incident laser on intensity of optical field. (a) (c)Spatial electric field distributions of prefabricated grating;(b) (d) electric field intensity distributions of ridges and grooves

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    Electric field intensity distributions of grating ridges

    Fig. 16. Electric field intensity distributions of grating ridges

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    Laser energy density threshold for excitation of LIPSS versus wavelength and pulse width. (a) Relationship between laser energy density threshold for excitation of LIPSS and laser wavelength; (b) Λ/λ versus laser energy density threshold for excitation of LIPSS; (c) laser energy density threshold for excitation of LIPSS versus laser pulse width; (d) laser peak power density for excitation of LIPSS versus laser pulse width

    Fig. 17. Laser energy density threshold for excitation of LIPSS versus wavelength and pulse width. (a) Relationship between laser energy density threshold for excitation of LIPSS and laser wavelength; (b) Λ/λ versus laser energy density threshold for excitation of LIPSS; (c) laser energy density threshold for excitation of LIPSS versus laser pulse width; (d) laser peak power density for excitation of LIPSS versus laser pulse width

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    • Table 1. Physical parameters of single-crystal germanium

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      Table 1. Physical parameters of single-crystal germanium

      ParameterSymbolValue
      Electron-hole pair heat conductivity［26］KC /［W/（m·K）］28exp（-2936/TC）
      Lattice heat conductivity［22］KL /［W/（m·K）］6.75×104TL-1.23
      Carrier heat conductivity［22］CC /［J/（m3·K）］3NkB
      Lattice heat capacity［22］CL /［J/（m3·K）］1.7×106（1+TL/6000）
      Auger recombination coefficient［22］γ /（m6/s）2×10-43
      Ambipolar diffusion coefficient［22］D /（m2/s）65×10-4（TL/300）-1.5
      Impact ionization coefficient［27］θ /（m2/J）1.2×10-2
      Bandgap［22］Eg /eV0.803‒3.9×10-4TL
      Energy relaxation time［22］τe /s4×10-13［1+（N/1027）2］
      One-photon absorption coefficient （355 nm）［28］α /（1/m）9.4×107
      Two-photon absorption coefficient （355 nm）［26］β /（m/W）0
      Free-carrier absorption cross-section （355 nm）［29］Θ /m2

      1.32×10-20（1.17/hv）Z1.5×

      exp［-Z（Z+5.2）/（Z1.3+5.2）］

      Latent heat of melting［26］Lm /（J/m3）2.8254×109
      Latent heat of evaporation［26］Lv /（J/m3）2.5226×1010
      Melting temperature［27］Tm /K1211
      Evaporation temperature ［27］Tv /K3104
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    Han Dai, Bing Han, Jing Zhang, Yanshuo Liu, Renjie Wang. Mechanism of Nanosecond and Picosecond Laser-Induced Periodic Structures Assisted by Prefabricated Structures on Single-Crystal Germanium Surfaces[J]. Chinese Journal of Lasers, 2024, 51(23): 2313001

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    Paper Information

    Category: micro and nano optics

    Received: Jan. 29, 2024

    Accepted: May. 31, 2024

    Published Online: Dec. 10, 2024

    The Author Email: Han Bing (hanbing@njust.edu.cn)

    DOI:10.3788/CJL240545

    CSTR:32183.14.CJL240545

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology