Journal of Synthetic Crystals, Volume. 52, Issue 2, 244(2023)
Study on Double Sided Polishing Technology of Large Size Irregular CdZnTe Wafer
References(1)
[12] [12] LI S Y, WANG Z, WU Y L. Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes［J］. Journal of Material Procssing Technology, 2008, 205(1-3): 34.
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LI Zhenxing, BAI Wei, WANG Yanzhang, LIU Jianggao, ZHANG Yingxia, SHE Weilin. Study on Double Sided Polishing Technology of Large Size Irregular CdZnTe Wafer[J]. Journal of Synthetic Crystals, 2023, 52(2): 244
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Received: Oct. 20, 2022
Accepted: --
Published Online: Mar. 18, 2023
The Author Email: Zhenxing LI (lizhenxing96@163.com)
CSTR:32186.14.
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