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Spectroscopy and Spectral Analysis, Volume. 35, Issue 8, 2287(2015)

Effects of Temperature on the Preparation of Al/Zn3N2 Thin Films Using Magnetron Reactive Sputtering

FENG Jun-qin1、* and CHEN Jun-fang1,2
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  • 1[in Chinese]
  • 2[in Chinese]
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    FENG Jun-qin, CHEN Jun-fang. Effects of Temperature on the Preparation of Al/Zn3N2 Thin Films Using Magnetron Reactive Sputtering[J]. Spectroscopy and Spectral Analysis, 2015, 35(8): 2287

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    Paper Information

    Received: Apr. 23, 2014

    Accepted: --

    Published Online: Aug. 25, 2015

    The Author Email: Jun-qin FENG (fengjq@gdut.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2015)08-2287-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology