Journal of Advanced Dielectrics, Volume. 15, Issue 4, 2540004(2025)
Effect of temperature and deposition power on microstructure and properties of magnetron sputtered thin AlN coatings
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Vasilina Lapitskaya, Andrey Nikolaev, Anastasiya Khabarava, Evgeniy Sadyrin, Sergei Aizikovich, Anaid Azoyan, Dmitry Kotov, Sergei Chizhik, Guangbin Yu, Weifu Sun. Effect of temperature and deposition power on microstructure and properties of magnetron sputtered thin AlN coatings[J]. Journal of Advanced Dielectrics, 2025, 15(4): 2540004
Paper Information
Category: Research Articles
Received: Nov. 14, 2024
Accepted: Feb. 16, 2025
Published Online: Aug. 5, 2025
The Author Email: Vasilina Lapitskaya (vasilinka.92@mail.ru)
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