Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range

Xiaoran Li; Yiwen Chen; Mojie Xie; Jiaoling Zhao

doi:10.3788/AOS231172

Acta Optica Sinica, Volume. 43, Issue 19, 1936001(2023)

Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range

Xiaoran Li^1,2、*, Yiwen Chen^1,2, Mojie Xie^1,2, and Jiaoling Zhao^2,3

Author Affiliations

¹School of Microelectronics, Shanghai University, Shanghai 200072, China

²Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

³Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Xiaoran Li, Yiwen Chen, Mojie Xie, Jiaoling Zhao. Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range[J]. Acta Optica Sinica, 2023, 43(19): 1936001

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Paper Information

Category: Letters

Received: Jun. 21, 2023

Accepted: Aug. 2, 2023

Published Online: Oct. 23, 2023

The Author Email: Xiaoran Li (w16a2z@163.com)

DOI:10.3788/AOS231172

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology