Fig. 1. Diagram of internal bending moment, torque and stress of plate under equilibrium state

Fig. 2. Relationship between thickness distribution and normalized radius

Fig. 3. Finite element division of deformable mirror

Fig. 4. Face shape cloud view of deformable mirror

Fig. 5. Relationship between third-order spherical aberration coefficient A₄₀ and linear forces

Fig. 6. Astigmatic shape with force of ±1 N applied to ends of orthogonal diameters

Fig. 7. Relationship between Zernike term coefficient of astigmatic plane and external force

Fig. 8. Surface shape cloud image of uniform thickness deformable mirror with 5 N load applied to edge

Fig. 9. 57 region positions loaded on deformable mirror with constant thickness

Fig. 10. Displacement cloud image of deformable mirror with constant thickness produced by movement of 57 nodes

Fig. 11. Structure of deformable mirror with variable thickness. (a) Deformable mirror; (b) overall structure

Fig. 12. Actual machined deformable mirror test piece. (a) Deformable mirror; (b) overall structure

Fig. 13. Experimental optical path of deformable mirror

Fig. 14. Initial surfaces of deformable mirror under different conditions. (a) Spherical aberration and astigmatism are existed; (b) defocus, spherical aberration, and astigmatism are removed

Fig. 15. Mirror surface of helical micrometer head relative to initial position at different displacement s. (a) s=0; (b) s=0.12 mm; (c) s=0.18 mm; (d) s=0.23 mm; (e) s=0.28 mm; (f) s=0.32 mm

Fig. 16. Relationship between Z₉ term in Zernike polynomial and displacement of mirror edge

Fig. 17. Astigmatic surfaces at different clearance. (a) t'=0; (b) t'=0.05 mm; (c) t'=0.10 mm; (d) t'=0.15 mm;(e) t'=0.20 mm; (f) t'=0.25 mm

Fig. 18. Relationship between astigmatic Zernike coefficients Z₅ and Z₆ and gap distance of rigid beams

Fig. 19. Experimental optical path of spherical aberration compensation for off-axis dual reflection optical system

Fig. 20. Spherical aberration wave surface change diagram compensated by deformable mirror. (a) s=0; (b) s=0.02 mm; (c) s=0.03 mm; (d) s=0.04 mm