[2] Miller S A, Chang Y C, Phare C T et al. Large scale optical phased array using a low-power multi-pass silicon photonic platform[J]. Optica, 7, 3-6(2020).

[3] Kim S, Westly D A, Roxworthy B J et al. Photonic waveguide to free-space Gaussian beam extreme mode converter[J]. Light： Science ＆ Applications, 6, 767-779(2018).

[4] Heck M J R. Highly integrated optical phased arrays： Photonic integrated circuits for optical beam shaping and beam steering[J]. Nanophotonics, 6, 93-107(2017).

[5] Jalali B, Fathpour S. Silicon photonics[J]. Journal of Lightwave Technology, 24, 4600-4615(2006).

[6] Meyer R A. Optical beam steering using a multichannel lithium tantalate crystal[J]. Applied Optics, 11, 613-616(1972).

[7] Karel V A, Wim B, Jana J et al. Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator[J]. Optics Letters, 34, 1477-1479(2009).

[8] Kwong D, Hosseini A, Zhang Y et al. 1×12 unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane[J]. Applied Physics Letters, 99, -3(2011).

[9] Kwong D, Hosseini A, Covey J et al. On-chip silicon optical phased array for two-dimensional beam steering[J]. Optics Letters, 39, 941-944(2014).

[10] Poulton C V, Byrd M J, Russo P et al. Long-range lidar and free-space data communication with high-performance optical phased arrays[J]. IEEE Journal of Selected Topics in Quantum Electronics, 7, 1-8(2019).

[11] Fatemi R, Khachaturian A, Hajimiri A. A nonuniform sparse 2-D large-Fov optical phased array with a low-power pwm drive[J]. IEEE Journal of Solid-State Circuits, 54, 1200-1215(2019).

[15] Zhao C, Peng C, Hu W. Blueprint for large-scale silicon optical phased array using electro-optical micro-ring pixels[J]. Scientific Reports, 7, 17727-17734(2017).

[17] Wang P, Luo G Z, Yu H Y et al. Improving the performance of optical antenna for optical phased arrays through high-contrast grating structure on SOI substrate[J]. Optics Express, 27, 2703-2712(2019).

[18] Ma W C, Tan S, Wang K K et al. Practical two-dimensional beam steering system using an integrated tunable laser and an optical phased array[J]. Applied Optics, 59, 9985-9994(2020).