Photonics Research, Volume. 10, Issue 5, 1170(2022)
Demonstration of electrically injected vertical-cavity surface-emitting lasers with post-supported high-contrast gratings On the Cover
References(40)
[1] F. Koyama. Recent advances of VCSEL photonics. J. Lightwave Technol., 24, 4502-4513(2006).
[2] R. Michalzik. VCSELs—Fundamentals, Technology and Applications of Vertical-Cavity Surface-Emitting Lasers, 166(2013).
[3] A. Liu, P. Wolf, J. A. Lott, D. Bimberg. Vertical-cavity surface-emitting lasers for data communication and sensing. Photon. Res., 7, 121-136(2019).
[4] A. Larsson. Advances in VCSELs for communication and sensing. IEEE J. Sel. Top. Quantum Electron., 17, 1552-1567(2011).
[5] H. Moench, S. Gronenborn, X. Gu, R. Gudde, M. Herper, J. Kolb, M. Miller, M. Smeets, A. Weigl. VCSELs in short-pulse operation for time-of-flight applications. Proc. SPIE, 10938, 109380E(2019).
[6] L. A. Graham, H. Chen, J. Cruel, J. Guenter, B. Hawkins, B. Hawthorne, D. Q. Kelly, A. Melgar, M. Martinez, E. Shaw, J. A. Tatum. High power VCSEL arrays for consumer electronics. Proc. SPIE, 9381, 93810A(2015).
[7] A. Liu, F. Fu, Y. Wang, B. Jiang, W. Zheng. Polarization-insensitive subwavelength grating reflector based on a semiconductor-insulator-metal structure. Opt. Express, 20, 14991-15000(2012).
[8] C. F. R. Mateus, M. C. Y. Huang, Y. Deng, A. R. Neureuther, C. J. Chang-Hasnain. Ultrabroadband mirror using low-index cladded subwavelength grating. IEEE Photon. Technol. Lett., 16, 518-520(2004).
[9] A. Liu, W. Hofmann, D. Bimberg. 2D analysis of finite size high-contrast gratings for applications in VCSELs. Opt. Express, 22, 11804-11811(2014).
[10] R. Magnusson, M. Shokooh-Saremi. Physical basis for wideband resonant reflectors. Opt. Express, 16, 3456-3462(2008).
[11] P. Debernardi, R. Orta, T. Gründl, M.-C. Amann. 3-D vectorial optical model for high-contrast grating vertical-cavity surface-emitting lasers. IEEE J. Quantum Electron., 49, 137-145(2013).
[12] A. Liu, W. Zheng, D. Bimberg. Comparison between high- and zero-contrast gratings as VCSEL mirrors. Opt. Commun., 389, 35-41(2017).
[13] M. C. Y. Huang, Y. Zhou, C. J. Chang-Hasnain. A surface-emitting laser incorporating a high-index-contrast subwavelength grating. Nat. Photonics, 1, 119-122(2007).
[14] M. C. Y. Huang, Y. Zhou, C. J. Chang-Hasnain. A nanoelectromechanical tunable laser. Nat. Photonics, 2, 180-184(2008).
[15] W. Hofmann, C. Chase, M. Müller, R. Yi, C. Grasse, G. Böhm, M. C. Amann, C. J. Chang-Hasnain. Long-wavelength high-contrast grating vertical-cavity surface-emitting laser. IEEE Photon. J., 2, 415-422(2010).
[16] K. Li, Y. Rao, C. Chase, W. Yang, C. J. Chang-Hasnain. Monolithic high-contrast metastructure for beam-shaping VCSELs. Optica, 5, 10-13(2018).
[17] S. Boutami, B. Benbakir, J.-L. Leclercq, P. Viktorovitch. Compact and polarization controlled 1.55 μm vertical-cavity surface emitting laser using single-layer photonic crystal mirror. Appl. Phys. Lett., 91, 071105(2007).
[18] E. Haglund, J. S. Gustavsson, J. Bengtsson, Å. Haglund, A. Larsson, D. Fattal, W. Sorin, M. Tan. Demonstration of post-growth wavelength setting of VCSELs using high-contrast gratings. Opt. Express, 24, 1999-2005(2016).
[19] M. Gębski, J. A. Lott, T. Czyszanowski. Electrically injected VCSEL with a composite DBR and MHCG reflector. Opt. Express, 27, 7139-7146(2019).
[20] S. Inoue, J. Kashino, A. Matsutani, H. Ohtsuki, T. Miyashita, F. Koyama. Highly angular dependent high-contrast grating mirror and its application for transverse-mode control of VCSELs. Jpn. J. Appl. Phys., 53, 090306(2014).
[21] T. Ansbæk, I.-S. Chung, E. S. Semenova, K. Yvind. 1060 nm tunable monolithic high index contrast subwavelength grating VCSEL. IEEE Photon. Technol. Lett., 25, 365-367(2013).
[22] J. Ferrara, W. Yang, L. Zhu, P. Qiao, C. J. Chang-Hasnain. Heterogeneously integrated long-wavelength VCSEL using silicon high contrast grating on an SOI substrate. Opt. Express, 23, 2512-2523(2015).
[23] G. C. Park, W. Xue, A. Taghizadeh, E. Semenova, K. Yvind, J. Mørk, I.-S. Chung. Hybrid vertical-cavity laser with lateral emission into a silicon waveguide. Laser Photon. Rev., 9, L11-L15(2015).
[24] T.-C. Chang, E. Hashemi, K.-B. Hong, J. Bengtsson, J. Gustavsson, Å. Haglund, T.-C. Lu. Electrically injected GaN-based vertical-cavity surface-emitting lasers with TiO2 high-index-contrast grating reflectors. ACS Photon., 7, 861-866(2020).
[25] A. Liu, B. Yang, P. Wolf, J. Zhang, D. Bimberg. GaAs-based subwavelength grating on an AlO
[26] J. Zhang, A. Liu. Dispersion engineering for a metastructure composed of a high-contrast subwavelength grating and a distributed Bragg reflector. Adv. Photon. Res., 2, 2000172(2021).
[27] J. Zhang, B. Yang, A. Liu. Design of 940 nm VCSEL with metastructure. Proc. SPIE, 11182, 111820O(2019).
[28] Z. Khan, J.-C. Shih, R.-L. Chao, T.-L. Tsai, H.-C. Wang, G.-W. Fan, Y.-C. Lin, J.-W. Shi. High-brightness and high-speed vertical-cavity surface-emitting laser arrays. Optica, 7, 267-275(2020).
[29] M. Agustin, N. Ledentsov, J.-R. Kropp, V. A. Shchukin, V. P. Kalosha, K. L. Chi, Z. Khan, J. W. Shi, N. N. Ledentsov. 50 Gb/s NRZ and 4-PAM data transmission over OM5 fiber in the SWDM wavelength range. Proc. SPIE, 10552, 1055202(2018).
[30] G. Larisch, R. Rosales, D. Bimberg. Energy-efficient 50+ Gb/s VCSELs for 200+ Gb/s optical interconnects. IEEE J. Sel. Top. Quantum Electron., 25, 1701105(2019).
[31] T. N. Huynh, F. Doany, D. M. Kuchta, D. Gazula, E. Shaw, J. O’Daniel, J. Tatum. 4×50 Gb/s NRZ shortwave-wavelength division multiplexing VCSEL link over 50 m multimode fiber. Optical Fiber Communication Conference, Tu2B.5(2017).
[32] A. Liu, P. Wolf, J.-H. Schulze, D. Bimberg. Fabrication and characterization of integrable GaAs-based high-contrast grating reflector and Fabry–Pérot filter array with GaInP sacrificial layer. IEEE Photon. J., 8, 2700509(2016).
[33] M. C. Y. Huang, Y. Zhou, C. J. Chang-Hasnain. Single mode high-contrast subwavelength grating vertical cavity surface emitting lasers. Appl. Phys. Lett., 92, 171108(2008).
[34] C. Chase, Y. Zhou, C. J. Chang-Hasnain. Size effect of high contrast gratings in VCSELs. Opt. Express, 17, 24002-24007(2009).
[35] D. Zhao, Z. Ma, W. Zhou. Field penetrations in photonic crystal Fano reflectors. Opt. Express, 18, 14152-14158(2010).
[36] G. C. Park, W. Xue, M. Piels, D. Zibar, J. Mørk, E. Semenova, I.-S. Chung. Ultrahigh-speed Si-integrated on-chip laser with tailored dynamic characteristics. Sci. Rep., 6, 38801(2016).
[37] L. A. Coldren, S. W. Corzine, M. L. Mašanović. Diode Lasers and Photonic Integrated Circuits(2012).
[38] M. Boroditsky, K. W. Kim, Y. Rahmat-Samii, E. Yablonovitch. Smallest possible electromagnetic mode volume in a dielectric cavity. IEE Proc. Optoelectron., 145, 391-397(1998).
[39] D. M. Kuchta, A. V. Rylyakov, F. E. Doany, C. L. Schow, J. E. Proesel, C. W. Baks, P. Westbergh, J. S. Gustavsson, A. Larsson. A 71 Gb/s NRZ modulated 850 nm VCSEL-based optical link. IEEE Photon. Technol. Lett., 27, 577-580(2015).
[40] J. Lavrencik, S. Varughese, V. A. Thomas, J. S. Gustavsson, E. Haglund, A. Larsson, S. E. Ralph. 102 Gbps PAM-2 over 50 m OM5 fiber using 850 nm multimode VCSELs. IEEE Photonics Conference, 1-2(2019).
Tools
Get Citation
Copy Citation Text
Jing Zhang, Chenxi Hao, Wanhua Zheng, Dieter Bimberg, Anjin Liu, "Demonstration of electrically injected vertical-cavity surface-emitting lasers with post-supported high-contrast gratings," Photonics Res. 10, 1170 (2022)
Paper Information
Category: Optoelectronics
Received: Nov. 4, 2021
Accepted: Mar. 2, 2022
Published Online: Apr. 14, 2022
The Author Email: Anjin Liu (liuanjin@semi.ac.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20