Chinese Journal of Lasers, Volume. 26, Issue 11, 982(1999)
A New Method for Recovering the Original Wave-front in Lateral-shearing Interferometry
[1] [1] Su Datu, Shen Hailong, Chen Jinbang et al.. Optical Testing and Image Evaluation (first edition). Beijing: Press of the Beijing University of Science and Engineering, 1988. 239~247
[2] [2] G. Makosch, B. Drollinger. Surface profile measurement with a scanning differential ac interferometer. Appl. Opt.,1984,23(24):4544~4553
[3] [3] Xu Wendong, Li Xishan. Measurement of surface roughness of optical disk substrates by differential polarization interferometry. Proc. SPIE, 1993, 2053:118~125
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. A New Method for Recovering the Original Wave-front in Lateral-shearing Interferometry[J]. Chinese Journal of Lasers, 1999, 26(11): 982