Spectroscopy and Spectral Analysis, Volume. 43, Issue 2, 394(2023)
Emission Spectroscopy Study of Remote Ar Plasma
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LI Ru, YANG Xin, XING Qian-yun, ZHANG Yu. Emission Spectroscopy Study of Remote Ar Plasma[J]. Spectroscopy and Spectral Analysis, 2023, 43(2): 394
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Received: Dec. 14, 2021
Accepted: --
Published Online: Mar. 28, 2023
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