Fig. 1. Working principle diagram of SiC-HPD device

Fig. 2. Structural diagram and simulation results of SiC-HPD device

Fig. 3. Picture of the fabricated SiC-HPD

Fig. 4. Comparison of performance changes of SiC diode before and after fabrication of SiC-HPD

Fig. 5. Test curves of electron gain of SiC-HPD

Fig. 6. Test curve of time response characteristics ofSiC-HPD