Fig. 1. Schematic diagram of VCSEL structure

Fig. 2. The packaged VCSEL

Fig. 3. Fabrication steps of micro-lens wet etching

Fig. 4. Surface morphology of the micro-lens by AFM

Fig. 5. P-I-V characteristics at room temperature (25 °C)

Fig. 6. P-I characteristics under 20~90 °C

Fig. 7. Measured output spectrum of the VCSEL

Fig. 8. Measured frequency line width of the VCSEL

Fig. 9. Packaged VCSEL magnetism-free module

Fig. 10. Testing results of the remaining magnetic field intensity of VCSEL