Journal of Synthetic Crystals, Volume. 52, Issue 11, 1907(2023)
Research Progress on Surface/Subsurface Damages of 4H Silicon Carbide Wafers
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LI Guofeng, CHEN Hongyu, HANG Wei, HAN Xuefeng, YUAN Julong, PI Xiaodong, YANG Deren, WANG Rong. Research Progress on Surface/Subsurface Damages of 4H Silicon Carbide Wafers[J]. Journal of Synthetic Crystals, 2023, 52(11): 1907
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Received: May. 28, 2023
Accepted: --
Published Online: Dec. 5, 2023
The Author Email: LI Guofeng (2112102259@zjut.edu.cn)
CSTR:32186.14.
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