Optoelectronic Technology, Volume. 39, Issue 1, 21(2019)
Fabrication of Self-aligned Top-gate a-IGZO TFT with Source-drain Doped by Hydrogen Diffusion
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FU Haishi, PENG Hao, ZHANG Xiaodong, ZHANG Shengdong. Fabrication of Self-aligned Top-gate a-IGZO TFT with Source-drain Doped by Hydrogen Diffusion[J]. Optoelectronic Technology, 2019, 39(1): 21
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Received: Nov. 6, 2018
Accepted: --
Published Online: Apr. 11, 2019
The Author Email: Haishi FU (1701213515@sz.pku.edu.cn)
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