Simulation and Experimental Research on Flat Top Femtosecond Laser Grooving of Silicon Wafer

Zhe Zhang; Qi Song; Kunpeng Zhang; Mei Xue; Yu Hou; Zichen Zhang

doi:10.3788/CJL230518

Chinese Journal of Lasers, Volume. 50, Issue 20, 2002202(2023)

Simulation and Experimental Research on Flat Top Femtosecond Laser Grooving of Silicon Wafer

Zhe Zhang^1,2, Qi Song^1,3, Kunpeng Zhang¹, Mei Xue¹, Yu Hou^1、*, and Zichen Zhang^1、**

¹Microelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

²School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

³International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, Jiling, China

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Zhe Zhang, Qi Song, Kunpeng Zhang, Mei Xue, Yu Hou, Zichen Zhang. Simulation and Experimental Research on Flat Top Femtosecond Laser Grooving of Silicon Wafer[J]. Chinese Journal of Lasers, 2023, 50(20): 2002202

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Paper Information

Category: Laser Surface Machining

Received: Feb. 13, 2023

Accepted: Apr. 3, 2023

Published Online: Aug. 10, 2023

The Author Email: Hou Yu (zz241@ime.ac.cn), Zhang Zichen (houyu@ime.ac.cn)

DOI:10.3788/CJL230518

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology