Chinese Journal of Lasers, Volume. 37, Issue 4, 1012(2010)

Beam Shaping Method for Uniform Illumination by Superposition of Multi-Tilted Gaussian Beams

Jiang Yanbing*, Yan Huimin, Zhang Xiuda, and Yao Jinliang
Author Affiliations
  • [in Chinese]
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    CLP Journals

    [1] Yu Zhan, Ma Haotong, Du Shaojun. Adaptive Near-Field Beam Shaping Based on Simulated Annealing Algorithm[J]. Acta Optica Sinica, 2011, 31(3): 314003

    [2] Zhao Yang, Gong Yan. Methods of Enhancing Uniformities of Output Beams from Beam Expanding Unit for Illumination System of Deep-Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(8): 822004

    [3] Fu Jianguo, Liang Jingqiu, Liang Zhongzhu. Analysis and Design for the Optical System of a Static Infrared Fourier Transform Spectrometer[J]. Acta Optica Sinica, 2012, 32(2): 222006

    [4] Zhao Yang, Gong Yan, Zhang Wei. Design of Beam Expanding Unit for Illumination System of DUV Lithography[J]. Acta Optica Sinica, 2011, 31(11): 1122004

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    Jiang Yanbing, Yan Huimin, Zhang Xiuda, Yao Jinliang. Beam Shaping Method for Uniform Illumination by Superposition of Multi-Tilted Gaussian Beams[J]. Chinese Journal of Lasers, 2010, 37(4): 1012

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    Paper Information

    Category: Beam transmission

    Received: Jun. 25, 2009

    Accepted: --

    Published Online: Apr. 20, 2010

    The Author Email: Yanbing Jiang (zjujyb@163.com)

    DOI:10.3788/cjl20103704.1012

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