Chinese Journal of Lasers, Volume. 36, Issue 4, 989(2009)
Size-Uniform and Controllable Si Nanoparticles Obtained by Regulating Target-to-Substrate Distance
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Wang Yinglong, Chu Lizhi, Deng Zechao, Yan Changyu, Fu Guangsheng. Size-Uniform and Controllable Si Nanoparticles Obtained by Regulating Target-to-Substrate Distance[J]. Chinese Journal of Lasers, 2009, 36(4): 989