[1] [1] I. Staude and J. Schilling, “Metamaterial-inspired silicon nanophotonics,”Nature Photonics, 2017, 11(5): 274–284.

[2] [2] K. Fan, R. D. Averitt, and W. J. Padilla, “Active and tunable nanophotonic metamaterials,”Nanophotonics, 2022, 11(17): 3769–3803.

[3] [3] A. Li, S. Singh, and D. Sievenpiper, “Metasurfaces and their applications,”Nanophotonics, 2018, 7(6): 989–1011.

[4] [4] W. A. Murray and W. L. Barnes, “Plasmonic materials,”Advanced Materials, 2007, 19(22): 3771–3782.

[5] [5] X. Fan, W. Zheng, and D. J. Singh, “Light scattering and surface plasmons on small spherical particles,”Light: Science & Applications, 2014, 3(6): e179-e179.

[6] [6] C. Battaglia, C. M. Hsu, K. Soderstrom, J. Escarr, F. J. Haug, M. Charriere,et al., “Light trapping in solar cells: can periodic beat random?”ACS Nano, 2012, 6(3): 2790–2797.

[7] [7] T. Lee, J. Kim, I. Koirala, Y. Yang, T. Badloe, J. Jang,et al., “Nearly perfect transmissive subtractive coloration through the spectral amplification of Mie scattering and lattice resonance,”ACS Applied Materials & Interfaces, 2021, 13(22): 26299–26307.

[8] [8] S. Z. Sekhi, M. Shokooh-Saremi, and M. M. Mirsalehi, “Ultra-broadband, wide-angle, and polarization-insensitive metamaterial perfect absorber for solar energy harvesting,”Journal of Nanophotonics, 2020, 14(4): 046014–046014.

[9] [9] L. T. Xu, M. Chen, Y. H. Weng, K. X. Xie, J. Wang, S. H. Cao,et al., “Label-free fluorescent nanofilm sensor based on surface plasmon coupled emission: in situ monitoring the growth of metal-organic frameworks,”Analytical Chemistry, 2022, 94(17): 6430–6435.

[10] [10] U. Mogera, H. Guo, M. Namkoong, M. S. Rahman, T. Nguyen, and L. Tian, “Wearable plasmonic paper-based microfluidics for continuous sweat analysis science advances,”American Association for the Advancement of Science, 2022, 8(12): eabn1736.

[11] [11] D. Barshilia, A. C. Komaram, P. C. Chen, L. K. Chau, and G. E. Chang, “Slab waveguide-based particle plasmon resonance optofluidic biosensor for rapid and label-free detection analyst,”Royal Society of Chemistry, 2022, 147(20): 4417–4425.

[12] [12] A. Gade, A. Sharma, N. Srivastava, and S. Flora, “Surface plasmon resonance: a promising approach for label-free early cancer diagnosis,”Clinica Chimica Acta, 2022, 527: 79–88.

[13] [13] M. Mohseni-Dargah, Z. Falahati, B. Dabirmanesh, P. Nasrollahi, and K. Khajeh, “Machine learning in surface plasmon resonance for environmental monitoring,” in Artificial Intelligence and Data Science in Environmental Sensing, M. Asadnia, A. Razmjou, and A. Beheshti, Eds., London: Academic Press, 2022: 269–298.

[14] [14] M. S. Brown and C. B. Arnold, “Fundamentals of laser-material interaction and application to multiscale surface modification,” in Laser Precision Microfabrication, K. Sugioka, M. Meunier, and A. Piqu, Eds., Berlin: Springer, 2010: 91–120.

[15] [15] T. Kurita, K. Komatsuzaki, and M. Hattori, “Advanced material processing with nano-and femto-second pulsed laser,”International Journal of Machine Tools and Manufacture, 2008, 48(2): 220–227.

[16] [16] J. Choi and C. Schwarz, “Advances in femtosecond laser processing of optical material for device applications,”International Journal of Applied Glass Science, 2020, 11(3): 480–490.

[17] [17] A. Klos, X. Sedao, T. E. Itina, C. Helfenstein-Didier, C. Donnet, S. Peyroche,et al., “Ultrafast laser processing of nanostructured patterns for the control of cell adhesion and migration on titanium alloy,”Nanomaterials, 2020, 10(5): 864

[18] [18] C. Kunz, S. Engel, F. A. Mller, and S. Grf, “Large-area fabrication of laser-induced periodic surface structures on fused silica using thin gold layers,”Nanomaterials, 2020, 10(6): 1187.

[19] [19] D. Zhang, R. Liu, and Z. Li, “Irregular LIPSS produced on metals by single linearly polarized femtosecond laser,”International Journal of Extreme Manufacturing, 2021, 4(1): 015102.

[20] [20] I. Gnilitskyi, T. J. Y. Derrien, Y. Levy, N. M. Bulgakova, T. Mocek, and L. Orazi, “High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity,”Scientific Reports, 2017, 7(1): 8485.

[21] [21] S. Sheta, M. S. Afgan, L. Jiacen, W. Gu, Z. Hou, and Z. Wang, “Insights into enhanced repeatability of femtosecond laser-induced plasmas,”ACS Omega, 2020, 5(47): 30425–30435.

[22] [22] Y. Zhang, Q. Jiang, K. Cao, T. Chen, K. Cheng, S. Zhang,et al., “Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser,”Photonics Research, 2021, 9(5): 839–847.

[23] [23] A. San-Blas, M. Martinez-Calderon, E. Granados, M. Gmez-Aranzadi, A. Rodrguez, and S. M. Olaizola, “LIPSS manufacturing with regularity control through laser wavefront curvature,”Surfaces and Interfaces, 2021, 25: 101205.

[24] [24] J. Sldek, K. Hlinomaz, I. Mirza, Y. Levy, T. J. Derrien, M. Cimrman,et al., “Highly regular LIPSS on thin molybdenum films: optimization and generic criteria,”Materials, 2023, 16(7): 2883.

[25] [25] J. Bonse and S. Grf, “Ten open questions about laser-induced periodic surface structures,”Nanomaterials, 2021, 11(12): 3326.

[26] [26] X. Liu, D. Du, and G. Mourou, “Laser ablation and micromachining with ultrashort laser pulses,”IEEE Journal of Quantum Electronics, 1997, 33(10): 1706–1716.

[27] [27] D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in machining of metals with short and ultrashort laser pulses,”Proceeding of SPIE,Photon Processing in Microelectronics and Photonics III, 2004, 5339: 49–63.

[28] [28] F. Dausinger, H. Hugel, and V. I. Konov, “Micromachining with ultrashort laser pulses: from basic understanding to technical applications,” inALT'02 International Conference on Advanced Laser Technologies, Adelboden, 2003, pp. 106–115.

[29] [29] Y. Zhang, X. Wang, K. Yan, H. Zhu, B. Wang, and B. Zou, “Laser micro/nano-structuring pushes forward smart sensing: opportunities and challenges,”Advanced Functional Materials, 2022, 33(8): 2211272.

[30] [30] E. Skoulas, A. C. Tasolamprou, G. Kenanakis, and E. Stratakis, “Laser induced periodic surface structures as polarizing optical elements,”Applied Surface Science, 2021, 541: 148470.

[31] [31] J. Bonse, S. V. Kirner, and J. Krger, “Laser-induced periodic surface structures (LIPSS),” in Handbook of Laser Micro-and Nano-Engineering, K. Sugioka, Eds., Cham: Springer, 2020: 1–59.

[32] [32] D. Dufft, A. Rosenfeld, S. Das, R. Grunwald, and J. Bonse, “Femtosecond laser-induced periodic surface structures revisited: a comparative study on ZnO,”Journal of Applied Physics, 2009, 105(3): 034908.

[33] [33] M. Handrea-Dragan and I. Botiz, “Multifunctional structured platforms: from patterning of polymer-based films to their subsequent filling with various nanomaterials,”Polymers, 2021, 13(3): 445.

[34] [34] S. Durbach, F. T. Krauss, M. Hoffmann, V. Lehmann, H. Reinhardt, J. Sundermeyer,et al., “Laser-driven one-and two-dimensional subwavelength periodic patterning of thin films made of a metal-organic MoS2 precursor,”ACS Nano, 2022, 16(7): 10412–10421.

[35] [35] M. Vlahou, F. Fraggelakis, P. Manganas, G. D. Tsibidis, A. Ranella, and E. Stratakis, “Fabrication of biomimetic 2D nanostructures through irradiation of stainless steel surfaces with double femtosecond pulses,”Nanomaterials, 2022, 12(4): 623.

[36] [36] H. Sun, J. Li, M. Liu, D. Yang, and F. Li, “A review of effects of femtosecond laser parameters on metal surface properties,”Coatings,2022, 12(10): 1596.

[37] [37] I. Gnilitskyi, W. Alnusirat, M. Sorgato, L. Orazi, and G. Lucchetta, “Effects of anisotropic and isotropic LIPSS on polymer filling flow and wettability of micro injection molded parts,”Optics & Laser Technology, 2023, 158: 108795.

[38] [38] M. H. Elshorbagy, L. M. Snchez-Brea, J. Buencuerpo, J. del Hoyo, . Soria-Garca, V. Pastor-Villarrubia,et al., “Polarization conversion using customized subwavelength laser-induced periodic surface structures on stainless steel,”Photonics Research, 2022, 10(9): 2024–2031.

[39] [39] A. Sharma, D. Marla, S. S. Joshi, and R. Bathe, “A study of femtosecond laser processed microtextures on silicon wafers to enhance optical absorption,”Lasers in Manufacturing and Materials Processing, 2022, 9(3): 277–291.

[40] [40] H. Wang, F. Zhang, and K. Yin, “Bioinspired antireflective subwavelength nanostructures induced by femtosecond laser for high transparency glass,”Journal of Non-Crystalline Solids, 2023, 600: 122016.

[41] [41] S. Mamykin, I. Gnilitskyi, M. Dusheyko, T. DeVol, and V. Bliznyuk, “Femtosecond laser nano-structuring for surface plasmon resonance-based detection of uranium,”Applied Surface Science, 2022, 576: 151831.

[42] [42] R. A. Hughes, E. Menumerov, and S. Neretina, “When lithography meets self-assembly: a review of recent advances in the directed assembly of complex metal nanostructures on planar and textured surfaces,”Nanotechnology, 2017, 28(28): 282002.

[43] [43] A. A. S. Falah, W. R. Wong, and F. R. M. Adikan, “Single-mode eccentric-core D-shaped photonic crystal fiber surface plasmon resonance sensor,”Optics & Laser Technology, 2022, 145: 107474.

[44] [44] M. H. Elshorbagy, A. Cuadrado, G. Gonzlez, F. J. Gonzlez, and J. Alda, “Performance improvement of refractometric sensors through hybrid plasmonic-fano resonances,”Journal of Lightwave Technology, 2019, 37(13): 2905–2913.

[45] [45] M. H. Elshorbagy, A. Cuadrado, B. Garcia-Camara, R. Vergaz, J. A. Gmez-Pedrero, and J. Alda, “Ultra-narrow spectral response of a hybrid plasmonic-grating sensor,”IEEE Sensors Journal, 2019, 20(7): 3520–3528.

[46] [46] J. Bonse and S. Grf, “Maxwell meets Marangoni − a review of theories on laser-induced periodic surface structures,”Laser & Photonics Reviews, 2020, 14(10): 2000215.

[47] [47] S. Hou, Y. Huo, P. Xiong, Y. Zhang, S. Zhang, T. Jia,et al., “Formation of long- and short-periodic nanoripples on stainless steel irradiated by femtosecond laser pulses,”Journal of Physics D: Applied Physics, 2011, 44(50): 505401.

[48] [48] A. Bijalwan and V. Rastogi, “Design and simulation of a palladium-aluminum nanostructure-based hydrogen sensor with improved figure of merit,”IEEE Sensors Journal, 2019, 19(15): 6112–6118

[49] [49] I. Saleem and W. K. Chu, “Gold nano-ripple structure with potential for bio molecular sensing applications,”Sensing and Bio-Sensing Research, 2016, 11: 14–19.

[50] [50] P. B. Johnson and R. W. Christy, “Optical constants of the noble metals,”Physical Review B, 1972, 6(12): 4370.

[51] [51] S. Roh, T. Chung, and B. Lee, “Overview of the characteristics of micro-and nano-structured surface plasmon resonance sensors,”Sensors, 2011, 11(12): 1565–1588.

[52] [52] J. Homola, I. Koudela, and S. S. Yee, “Surface plasmon resonance sensors based on diffraction gratings and prism couplers: sensitivity comparison,”Sensors and Actuators B: Chemical, 1999, 54 (1–2): 16–24.

[53] [53] M. Vala, K. Chadt, M. Piliarik, and J. Homola, “High-performance compact SPR sensor for multi-analyte sensing,”Sensors and Actuators B: Chemical, 2010, 148(2): 544–549.

[54] [54] K. M. Mayer and J. H. Hafner, “Localized surface plasmon resonance sensors,”Chemical Reviews, 2011, 111(6): 3828–3857.

[55] [55] D. W. Huang, Y. F. Ma, M. J. Sung, and C. P. Huang, “Approach the angular sensitivity limit in surface plasmon resonance sensors with low index prism and large resonant angle,”Optical Engineering, 2010, 49(5): 054403.