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Chinese Journal of Lasers, Volume. 35, Issue s2, 137(2008)

Nonlinear Error Introduced by Beam Splitters in an Interferometric Ellipsometer

Deng Yuanlong1、*, Li Xuejin2, Chai Jinlong1, and Xu Gang1
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    Deng Yuanlong, Li Xuejin, Chai Jinlong, Xu Gang. Nonlinear Error Introduced by Beam Splitters in an Interferometric Ellipsometer[J]. Chinese Journal of Lasers, 2008, 35(s2): 137

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    Received: --

    Accepted: --

    Published Online: Jan. 5, 2009

    The Author Email: Yuanlong Deng (dengyL@szu.edu.cn)

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology