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Acta Optica Sinica, Volume. 45, Issue 14, 1420022(2025)

Silicon-Based Single-Ended Push-Pull Modulator Design with Performance Balancing for 100 Gbit/s DP-QPSK Transmitter

Hong Wang1,2, Yiti Xiong2, Xiongping Bao2,3, Wenjun Li2,3, Boyu Zhang1,2, Weibiao Chen2,3、*, and Libing Zhou2,3、**
Author Affiliations
  • 1Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, Anhui , China
  • 2Aerospace Laser Technology and Systems Department, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    References(17)

    [1] Thomson D J, Zhang W, Ebert M et al. High efficiency and high-speed silicon optical modulators[C]. Romania, 1-4(2023).

    [2] Han C H, Wang H Y, Shu H W et al. Latest research progress in silicon-based modulators (invited)[J]. Acta Optica Sinica, 44, 1513017(2024).

    [3] Liu A S, Liao L, Rubin D et al. High-speed optical modulation based on carrier depletion in a silicon waveguide[J]. Optics Express, 15, 660-668(2007).

    [4] Yang Y, Fang Q, Yu M B et al. High-efficiency Si optical modulator using Cu travelling-wave electrode[J]. Optics Express, 22, 29978-29985(2014).

    [5] Li M F, Wang L, Li X et al. Silicon intensity Mach-Zehnder modulator for single lane 100 Gb/s applications[J]. Photonics Research, 6, 109-116(2018).

    [6] Yuan H J, Sun C L, Zhao J. High-speed hetero-doped silicon-based slot waveguide modulator[J]. Acta Optica Sinica, 43, 0723002(2023).

    [7] Tang F, Pan D, Yu F et al. Femtosecond laser two-photon high-efficiency processing based on spatial light modulator (invited)[J]. Chinese Journal of Lasers, 51, 1202401(2024).

    [8] Reinsel D, Gantz J, Rydning J. The digitization of the world from edge to core[R], 1-66(2018).

    [9] Gardes F Y, Reed G T, Emerson N G et al. A sub-micron depletion-type photonic modulator in silicon on insulator[J]. Optics Express, 13, 8845-8854(2005).

    [10] Zhou L J, Zhou Y Y, Lu L J. Design optimization and implementation of silicon Mach-Zehnder electro optic modulators[J]. ZTE Technology Journal, 23, 21-29(2017).

    [11] Soref R, Bennett B. Electrooptical effects in silicon[J]. IEEE Journal of Quantum Electronics, 23, 123-129(1987).

    [12] Ghione G[M]. Semiconductor devices for high-speed optoelectronics(2009).

    [13] Zhou J Y, Wang J, Zhu L K et al. Silicon photonics for 100 Gbaud[J]. Journal of Lightwave Technology, 39, 857-867(2021).

    [14] Zhou Y Y, Zhou L J, Zhu H K et al. Modeling and optimization of a single-drive push‒pull silicon Mach-Zehnder modulator[J]. Photonics Research, 4, 153-161(2016).

    [15] Feng N N, Liao S R, Feng D Z et al. High speed carrier-depletion modulators with 1.4 V-cm VπL integrated on 0.25 μm silicon-on-insulator waveguides[J]. Optics Express, 18, 7994-7999(2010).

    [16] Tu X G, Chang K F, Liow T Y et al. Silicon optical modulator with shield coplanar waveguide electrodes[J]. Optics Express, 22, 23724-23731(2014).

    [17] Zhang B F, Zhao G, Yan X J et al. Dual-drive Mach-Zehnder modulator-based laser ranging technology[J]. Chinese Journal of Lasers, 50, 0204001(2023).

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    Hong Wang, Yiti Xiong, Xiongping Bao, Wenjun Li, Boyu Zhang, Weibiao Chen, Libing Zhou. Silicon-Based Single-Ended Push-Pull Modulator Design with Performance Balancing for 100 Gbit/s DP-QPSK Transmitter[J]. Acta Optica Sinica, 2025, 45(14): 1420022

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    Paper Information

    Category: Optics in Computing

    Received: Mar. 6, 2025

    Accepted: May. 20, 2025

    Published Online: Jul. 21, 2025

    The Author Email: Weibiao Chen (wbchen@siom.ac.cn), Libing Zhou (lbzhou@siom.ac.cn)

    DOI:10.3788/AOS250703

    CSTR:32393.14.AOS250703

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology