Journal of Infrared and Millimeter Waves, Volume. 43, Issue 6, 755(2024)

Study on photoelectric performance of ultra-small pixel pitch micro-mesa InGaAs detector

Yu TIAN1,2, Chun-Lei YU2、*, Xue LI2, Xiu-Mei SHAO2, Tao LI2, Bo YANG2, Xiao-Yuan YU1,2, Jia-Shen CAO2, and Hai-Mei GONG2、**
Author Affiliations
  • 1School of Information Science and Technology,ShanghaiTech University,Shanghai 201210,China
  • 2State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
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    [1] Zhang Yong-Gang, Gu Yi, Ma Ying-Jie et al. The magic of Ⅲ-Ⅴs[J]. Journal of Infrared and Millimeter waves..

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    [3] Li Xue, Shao Xiu-mei, Li Tao et al. Developments of short-wave infrared InGaAs focal plane detectors[J]. Infrared and Laser Engineering.

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    [6] Armstrong, J M, Skokan M R, Kinch M A et al. HDVIP five-micron pitch HgCdTe focal plane arrays[C], 907033(2014).

    [7] Du, X, Savich G R, Marozas B T et al. Suppression of lateral diffusion and surface leakage currents in nBn photodetectors using an inverted design[J]. Journal of Electronic Materials, 47, 1038-1044(2017).

    [8] Chen Bai-Le, Yuan Jin-Rong, Holmes A L et al. Dark current modeling of InP based SWIR and MWIR InGaAs GaAsSb type-II MQW photodiodes[J]. Optical and Quantum Electronics, 45, 271-277(2013).

    [9] Ji Xiao-Li, Liu Bai-Qing, Tang Heng-Jing et al. 2.6 μm MBE grown InGaAs detectors with dark current of SRH and TAT[J]. AIP Advances, 4, 087135(2014).

    [10] Liu Ya-Ge, Ma Ying-Jie, Li Xue et al. Surface leakage behaviors of 2.6 µm In0.83Ga0.17As photodetectors as a function of mesa etching depthg[J]. IEEE Journal of Quantum Electronics, 56, 1-6(2020).

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    Yu TIAN, Chun-Lei YU, Xue LI, Xiu-Mei SHAO, Tao LI, Bo YANG, Xiao-Yuan YU, Jia-Shen CAO, Hai-Mei GONG. Study on photoelectric performance of ultra-small pixel pitch micro-mesa InGaAs detector[J]. Journal of Infrared and Millimeter Waves, 2024, 43(6): 755

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    Paper Information

    Category: Infrared Physics, Materials and Devices

    Received: Feb. 1, 2024

    Accepted: --

    Published Online: Dec. 13, 2024

    The Author Email: Chun-Lei YU (yuchunlei@mail.sitp.ac.cn), Hai-Mei GONG (hmgong@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2024.06.005

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